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Brooks Automation FIXLOAD 25 Wafer Load Port

Manufacturer Part Number: 013077-120-20
Price: $2,500.00
Quantity:
Brooks Automation FIXLOAD 25 Wafer Load Port
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Brooks Automation FIXLOAD 25 Wafer Load Port

FIXLOAD Features:

  • Most accurate and fastest wafer access (6 sec.)
  • BOLTS interface
  • HyBridge OC200 (FIXLOAD 25)
  • Fully SEMI compliant + CE certified
  • Follows I300I guidelines
  • Choice of electronic solution (Basic I/O, CPU Control, Device Net)
  • E84 Parallel I/O
  • Parallel interlocking
  • Single connector interface communication for: E84, Carrier ID and FixMAP
  • Kinematic couplings for proper placement

Optional Features:

  • 13- or 25-wafer capacity
  • Integration of Carrier ID Reader/Writer (IR, RF, Barcode)
  • Safety frame
  • FEOL/BEOL lock out pin
  • Carriage

Benefits:

  • Highest cleanliness (CC 0.01 acc. to Fed. Stand. 209E)
  • Field proven reliability
  • Prepared for customized configurations
  • Easy and seamless integration with process tool
  • Small footprint
  • Easiest maintenance access
  • Ergonomic loading height

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Brooks Automation FIXLOAD 25 Wafer Load Port
FIXLOAD
Model # Serial #  
FIXLOAD 6 0601-11493 -
FIXLOAD 6 0603-11177 -
FIXLOAD 6 0603-11179 -
FIXLOAD 6 0603-11180 -
FIXLOAD 6 0606-10018 -
FIXLOAD 6 0606-10019 -
FIXLOAD 6 0606-10023 -
FIXLOAD 6 0606-10024 -
FIXLOAD 6 0606-10025 -
FIXLOAD 6 07194 -
FIXLOAD 6 071604 -
FIXLOAD 6 071804 -
FIXLOAD 6 0612-13106  
FIXLOAD 6 0612-13107  
FIXLOAD 6 113403  
FIXLOAD 6 102004  
FIXLOAD 25 007902  
FIXLOAD 25 008302  
FIXLOAD 25 116201  
FIXLOAD 25 025301  
FIXLOAD 25 157802  
FIXLOAD 25 256601  
FIXLOAD 25 241301  
FIXLOAD 25 125901  
FIXLOAD 25 130401  

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