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Adixen Alcatel A100L iPUP Dry Vacuum Pump - REBUILT

Price: $7,600.00
Quantity:
Adixen Alcatel A100L iPUP Dry Vacuum Pump - REBUILT
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Adixen Alcatel A100L iPUP Semiconductor Dry Vacuum Pump - REBUILT

The pump is designed for applications that require the pumping of clean (dust-free) and non-corrosive gases. Examples are:

  • Instrumentation
  • Gas analysis
  • Electronic microscope
  • X-ray spectrometer
  • Leak detection 
  • Surface analyzer
  • Research and development
  • Semiconductor fabrication
  • Load lock and transfer chamber pumping
  • Wafer back pumping

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Rotation speed 100 Hz / 6,000 rpm
Peak pumping speed 95 m3/h / 1,583 l/min / 63 cfm
Ultimate pressure (w/out N2 purge) 1.2 x 10-2 mbar / 9 mTorr
Max. continuous inlet pressure 50 Torr
Supply voltage 200 - 208 V 3-phase 50/60Hz
Max. continuous power (at max. pressure) 2.5 kW
Power consumption at ultimate pressure 1.8 kW
Average sound level at full speed 55 dBA
Guaranteed sound level at full speed 58 dBA
Ambient temperature 15 - 50°C
Water flow min. 100 l/h
Water temperature min. 10°C / max. 25°C
Gear box fluid capacity 150 cm3 cc
Weight (w/out hand held display module) 220.4 lbs / 100 kg
Inlet flange DN 50 ISO-KF
Exhaust flange DN 25 ISO-KF
Secondary exhaust port DN 25 ISO-KF
Interstage flange DN 25 ISO-KF
Max. exhaust flow 13 cfm
Vibration level at the enclosure baseplate sidehole (4 to 400 Hz Spectrum)  
    Acceleration < 0.1 G
    Displacement < 1.5 μm
    Speed < 1 mm/s

Digital Manual - iPUP A100

Digital Manual - iPUP E100

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Adixen Alcatel A100L iPUP Semiconductor Dry Vacuum Pump - REBUILT