Home >
Vacuum Pumps
>
Dry
>
Other Mfg.
>
Pfeiffer Adixen Alcatel
>
ACP & ADP - REBUILT
> Adixen Alcatel A100L iPUP - REBUILT
Adixen Alcatel A100L iPUP - REBUILT
Adixen Alcatel A100L iPUP Semiconductor Dry Vacuum Pump - REBUILT
The pump is designed for applications that require the pumping of clean (dust-free) and non-corrosive gases. Examples are:
- Instrumentation
- Gas analysis
- Electronic microscope
- X-ray spectrometer
- Leak detection
- Surface analyzer
- Research and development
- Semiconductor fabrication
- Load lock and transfer chamber pumping
- Wafer back pumping
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Rotation speed | 100 Hz / 6,000 rpm |
Peak pumping speed | 95 m3/h / 1,583 l/min / 63 cfm |
Ultimate pressure (w/out N2 purge) | 1.2 x 10-2 mbar / 9 mTorr |
Max. continuous inlet pressure | 50 Torr |
Supply voltage | 200 - 208 V 3-phase 50/60Hz |
Max. continuous power (at max. pressure) | 2.5 kW |
Power consumption at ultimate pressure | 1.8 kW |
Average sound level at full speed | 55 dBA |
Guaranteed sound level at full speed | 58 dBA |
Ambient temperature | 15 - 50°C |
Water flow | min. 100 l/h |
Water temperature | min. 10°C / max. 25°C |
Gear box fluid capacity | 150 cm3 cc |
Weight (w/out hand held display module) | 220.4 lbs / 100 kg |
Inlet flange | DN 50 ISO-KF |
Exhaust flange | DN 25 ISO-KF |
Secondary exhaust port | DN 25 ISO-KF |
Interstage flange | DN 25 ISO-KF |
Max. exhaust flow | 13 cfm |
Vibration level at the enclosure baseplate sidehole (4 to 400 Hz Spectrum) | |
Acceleration | < 0.1 G |
Displacement | < 1.5 μm |
Speed | < 1 mm/s |
Digital Manual - iPUP A100
Digital Manual - iPUP E100
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Adixen Alcatel A100L iPUP Semiconductor Dry Vacuum Pump - REBUILT