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Alcatel ATH 1300 M Turbo Vacuum Pump - REBUILT

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Alcatel ATH 1300 M Turbo Vacuum Pump - REBUILT
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Pfeiffer Adixen Alcatel ATH 1300 M Turbomolecular Vacuum Pump - REBUILT

5-axis magnetically levitated turbopump with drag stage for a pump speed of up to 1,400 l/s for N2.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Pumping speed — (N2, L/sec.) 1,250
Compression ratio: N2 1.0 x 107
Compression ratio: He 2.0 x 103
Compression ratio: H2 1.0 x 102
Inlet flanges ISO200-F
Foreline flange QF40
Ultimate pressure — Torr (mbar) 8.0 x 10-9
Pump weight — lbs. (kg) 75.5 (34)
Maximum foreline pressure — Torr (mbar)     1.125 (1.5)
Cooling method Water
Orientation Any
Maximum throughput (sccm, N2) 3,000

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Pfeiffer Adixen Alcatel ATH 1300 M Turbomolecular Vacuum Pump - REBUILT

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