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Advanced Energy AE Apex 1513 RF Power Generator
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Manufacturer Part Number: A3L3L000CA140D111A
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Advanced Energy AE Apex 1513 RF Power Generator
The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.
We have the following Apex 1513 generators:
- A3L3L000CA140D111A
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Specifications | Apex 1513 | Apex 3013 | Apex 5513 |
|---|---|---|---|
| Line voltage | |||
| Pin 0 | 208 V nominal, 187 to 229 VAC, 3φ | ||
| Pin 1 | 400 V nominal, 360 to 440 VAC, 3φ | ||
| Pin 2 | N/A | ||
| Pin 3 | 208 V nominal, 187 to 229 VAC, 3φ | ||
| Pin 4 | 400 V nominal, 360 to 440 VAC, 3φ | ||
| Line frequency | 47 to 63 Hz | ||
| Line current - Typical A/φ and circuit breaker rating for units with 208 VAC nominal input (PIN position 3, options 0 and 3) | 1,500 W / 13.56 MHz - 9 A/φ; 15 A breaker | 3,000 W / 13.56 MHz - 14 A/φ; 25 A breaker | 5,500 W / 13.56 MHz - 25 A/φ; 40 A breaker |
| Line current - Typical A/φ and circuit breaker rating for units with 400 VAC nominal input (PIN position 3, option 1) | - | 3,000 W / 13.56 MHz - 9 A/φ; 15 A breaker | 5,500 W / 13.56 MHz - 15 A/φ; 25 A breaker |
| Output frequency - varies according to the option defined by PIN position 1 | |||
| Pin 0 | N/A | ||
| Pin 3 | 13.56 MHz, ±0.005% | ||
| Full-rated output power (Minimum into a 50 Ω, nonreactive load) - varies according to the option defined by PIN position 2 | |||
| Pin A | 1,000 W | ||
| Pin B | 1,500 W | ||
| Pin C | 2,000 W | ||
| Pin D | 3,000 W | ||
| Pin E | 4,000 W | ||
| Pin F | 5,500 W | ||
| Pin J | 5,000 W | ||
| Pin K | 1,000 W high accuracy low output (HALO) | ||
| Pin L | 1,500 W HALO minimum into a 50 Ω, non-reactive | ||
| Pin M | 3,500 W | ||
| Output impedance - varies according to the option defined by PIN position 9 | |||
| Pin A | 50 Ω | ||
| Pin B | exclusive option #1 | ||
| Pin C | exclusive option #2 | ||
| Pin D | exclusive option #5 | ||
| Pin E | exclusive option #6 | ||
| Pin F | exclusive option #3 | ||
| Pin G | exclusive option #4 | ||
| Pin H | exclusive option #7 | ||
| Pin J | exclusive option #8 | ||
| Delivered power into 2:1 VSWR loads - varies according to the option defined by PIN position 2 | |||
| Pin B | 1.5 kW = 1,125 W | ||
| Pin D | 3 kW = 2,000 W | ||
| Pin F | 5.5 kW = 3,350 W | ||
| Delivered power into 3:1 VSWR loads - varies according to the option defined by PIN position 2 | |||
| Pin B | 1.5 kW = 650 W | ||
| Pin D | 3 kW = 1,200 W | ||
| Pin F | 5.5 kW = 1,900 W | ||
| Output protection—Apex generators sense and employ several parameters for protection | |||
| Reflected power limit | 20% of maximum forward power for units rated for less than 5,500 W. 1,000 W for 5,500 W units. (PIN position 2 defines the maximum forward power rating for the unit) | ||
| Dissipation limit | Maximum PA dissipation - non-latching alarm LED | ||
| Low/high line bus | Bus voltage outside spec window—latching alarm LED | ||
| Over-temperature | Over-temp condition—latching alarm LED preceded by non-fault warning (user setting) | ||
| Output power range | All generators except the HALO will allow setpoints between 1% and 100% of full scale. The exception is the HALO 1.5k generator depicted by “L” in position 2 of the PIN number. This allows setpoints from 5 W to 1,500 W | ||
| Output power regulation accuracy | |||
| Into 50 Ω non-reactive load |
± 1% of setpoint or ± 0.1% of full-rated output, whichever is greater (all PIN position 2 options but K and L) ≤ ±1% of setpoint or 0.25 W, whichever is greater (PIN position 2, option K & L) |
||
| Into 3:1 VSWR nonreactive load | ± 3% of setpoint (load power regulation), over all load phase angles, or ± 0.25% of full-rated output, which ever is greater | ||
| Load regulation as a function of line regulation | Less than 0.1% change in output power for 10% change in AC line voltage | ||
| Load regulation as a function of temperature—(performance in accordance with the output power regulation accuracy) | |||
| Ambient air temperature range | +5°C to +40°C | ||
| Cooling water temperature range | +5°C to +35°C | ||
| Spurious outputs - Referenced to fundamental signal at full-rated output when operated in a 50 Ω non-reactive load | |||
| Harmonic related | -40 dBc | ||
| Non-harmonic related | -50 dBc | ||
| Warm up | Approximately 2 s from AC-on to RF-on | ||
| RF on response time | < 7 ms (6.4 ms typical) | ||
| Turn-off/decay time | 10 μs until output decays to 1% of maximum rated value | ||
| Power repeatability | ≤ 0.5% over time for same generator for setpoints > 500 W. 1% generator to generator as measured against AE calorimetric standard | ||
| Power cycles, standard options - applies to units with options 0 through 5 in PIN position 6. | 6 million cycles, 0 to full power into a matched load 360 kilocycles, 0 to full power into high dissipation load | ||
| Power cycles w/ DC heating option - DC heating option applies only to units with option 6 or 7 in PIN position 6 | 30 million cycles, 0 to full power into a matched load 5 million cycles, 0 to full power into high dissipation load | ||
| Efficiency (line to load) | 60%, typical @ full-rated power, nominal line | ||
| Power factor | > 0.96 | ||
| Maximum leakage current | 3.5 mA | ||
| Master - Slave / CEX (The Apex generator automatically locks the RF output signal phase to the common exciter—CEX—input signal phase when the following conditions are met.) | |||
| Phase relationship (RF output inphase with the CEX input signal) | 0° ± 5° | ||
| CEX in |
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| CEX out |
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| Temperature | +35°C (+95°F) - maximum water temperature at minimum flow rate and maximum ambient air temperature (+40° C) | ||
| Flow rate - varies according to the option defined by PIN position 2 |
For ≤ 3kW 7.6 1pm (2 gpm) For > 3kW 11.4 1pm (3 gpm) |
||
| Pressure | |||
| Minimum pressure differential (supply to drain) required to achieve specified minimum flow rates) |
For ≤ 3kW 0.9 Bar (13psi) For > 3kW 2 Bar (29 psi) |
||
| Maximum pressure rating | 6.9 Bar (100 psi) | ||
| Heat removal | 3,410 BTU/hour, 1,000 W at full rated output power | 6,825 BTU/hour, 2,000 W at full rated output power | 12,500 BTU/hour, 3,660 W at full rated RF output power |
| Contaminates |
The following specifications are recommended for the water used to cool the Apex generator:
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| PIN Position | Apex Feature | Options, Descriptions & Cross-References |
|---|---|---|
| 1 | Output frequency |
|
| 2 | Power output |
|
| 3 | Input voltage |
|
| 4 | Packaging |
|
| 5 | Panel |
|
| 6 | Serial I/O |
|
| 7 | Serial Port 2 |
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| 8 | User port options |
|
| 9 | Output impedance |
|
| 10 | On-board RF output connector location |
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| 11 | Output connector |
|
| 12 | RF measurement |
|
| 13 | AC power input |
|
| 14 | Pulsing |
|
| 15 | CEX |
|
| 16 | Water fitting threads |
|
| 17 | Custom configuration |
|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
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