Advanced Energy AE Apex 1513 RF Power Generator

The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.

We have the following Apex 1513 generators:

• A3L3L000CA140D111A

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Advanced Energy AE Apex 1513 RF Power Generator

A3D0G000CF001B001A
A3D3G000CJ001H001A
A3D3G000HK001H001A
A3D3L000BA140A111A
A3D3L000BA140A121A
A3D3L000CA140A111A
A3D3L000CA140A121A
A3D5G000HK001H001A
A3D5L000BA140A121A
A3F1A030GA110A000A
A3F1A060GA110A000A
A3F1A0B0GA110A000A
A3F2A000BA120A101A
A3L3L000CA140D111A
A3L5L000BA140A121A
A3L5L000BA140D111A
A7L2A000BA140L011A
A8L2A000BA140L011A
A3L5L000BA140D111A
A7L2A000BA140L011A
A7L2A000BA140L011A
A8L2A000BA140L011A
A3L2A000BA140L011A
A3B2A000BA150A111A
A3B2B000BA140A011A
A3B2A000BA150D001D
A3B2A000BA140L011A
A3D2A000BA140A001A
A3D2A030BA140A020A
A3D2B000GA130A111A
A3D5L000BA140A121A
A3D2Q000KA130A002D
A3D2B000GA140A011A
A3D2M000NA140A011A
A3D2B030BA140A001A
A3D5G000HK001U001A
A3D2A000BA140A011A
A3D2A000BA140A111A
A3D2L000BA120R131A
A3P4A000BA140A011A
A3F2L000BA110R011A
A3F2A000DA130A102D
A3F2A030BA170A004A
A3F2B000GA130A111A
A3J2Q000KA130A002D
A3F4A000BA110A011A
A3F4L030BA110A020A
A3F4B070PA110A010A
A3F4B060GA110A011A
A3F4A070GA110A010A
A3F2B050BA130A011A
A3F4A060AA110A000A
A3F4A060GA110A000A
A3F4B070BA110A010A
A3F5L000BA120R131A
3156113-012
3156110-007