Advanced Energy AE Apex 1513 RF Power Generator

The versatile Apex^® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.

We have the following Apex 1513 generators:

• A3L3L000CA140D111A
• A3L3L000CA140D111A
• A3L3L000CA140D111A

Digital Manual

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Advanced Energy AE Apex 1513 RF Power Generator

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