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Advanced Energy AE Apex 3013 RF 13.56 MHz Power Generator

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Advanced Energy AE Apex 3013 RF 13.56 MHz Power Generator
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Advanced Energy AE Apex 3013 RF 13.56 MHz Power Generator

The versatile Apex family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.

We have the following Apex 3013 generators in stock:

  • A3D3G000CJ001H001A
  • A3D0G000CF001B001A
  • APEX 3K DISPLAY

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Specifications Apex 1513 Apex 3013 Apex 5513
Line voltage
    Pin 0 208 V nominal, 187 to 229 VAC, 3φ
    Pin 1 400 V nominal, 360 to 440 VAC, 3φ
    Pin 2 N/A
    Pin 3 208 V nominal, 187 to 229 VAC, 3φ
    Pin 4 400 V nominal, 360 to 440 VAC, 3φ
Line frequency 47 to 63 Hz
Line current  - Typical A/φ and circuit breaker rating for units with 208 VAC nominal input (PIN position 3, options 0 and 3) 1,500 W / 13.56 MHz - 9 A/φ; 15 A breaker 3,000 W / 13.56 MHz - 14 A/φ; 25 A breaker 5,500 W / 13.56 MHz - 25 A/φ; 40 A breaker
Line current - Typical A/φ and circuit breaker rating for units with 400 VAC nominal input (PIN position 3, option 1) - 3,000 W / 13.56 MHz - 9 A/φ; 15 A breaker 5,500 W / 13.56 MHz - 15 A/φ; 25 A breaker
Output frequency - varies according to the option defined by PIN position 1
    Pin 0 N/A
    Pin 3 13.56 MHz, ±0.005%
Full-rated output power (Minimum into a 50 Ω, nonreactive load) - varies according to the option defined by PIN position 2
    Pin A 1,000 W
    Pin B 1,500 W
    Pin C 2,000 W
    Pin D 3,000 W
    Pin E 4,000 W
    Pin F 5,500 W
    Pin J 5,000 W
    Pin K 1,000 W high accuracy low output (HALO)
    Pin L 1,500 W HALO minimum into a 50 Ω, non-reactive
    Pin M 3,500 W
Output impedance - varies according to the option defined by PIN position 9
    Pin A 50 Ω
    Pin B exclusive option #1
    Pin C exclusive option #2
    Pin D exclusive option #5
    Pin E exclusive option #6
    Pin F exclusive option #3
    Pin G exclusive option #4
    Pin H exclusive option #7
    Pin J exclusive option #8
Delivered power into 2:1 VSWR loads - varies according to the option defined by PIN position 2
    Pin B 1.5 kW = 1,125 W
    Pin D 3 kW = 2,000 W
    Pin F 5.5 kW = 3,350 W
Delivered power into 3:1 VSWR loads - varies according to the option defined by PIN position 2
    Pin B 1.5 kW = 650 W
    Pin D 3 kW = 1,200 W
    Pin F 5.5 kW = 1,900 W
Output protection—Apex generators sense and employ several parameters for protection
    Reflected power limit 20% of maximum forward power for units rated for less than 5,500 W. 1,000 W for 5,500 W units. (PIN position 2 defines the maximum forward power rating for the unit)
    Dissipation limit Maximum PA dissipation - non-latching alarm LED
    Low/high line bus Bus voltage outside spec window—latching alarm LED
    Over-temperature Over-temp condition—latching alarm LED preceded by non-fault warning (user setting)
    Output power range All generators except the HALO will allow setpoints between 1% and 100% of full scale. The exception is the HALO 1.5k generator depicted by “L” in position 2 of the PIN number. This allows setpoints from 5 W to 1,500 W
Output power regulation accuracy
    Into 50 Ω non-reactive load

± 1% of setpoint or ± 0.1% of full-rated output, whichever is greater (all PIN position 2 options but K and L)

≤ ±1% of setpoint or 0.25 W, whichever is greater (PIN position 2, option K & L)
    Into 3:1 VSWR nonreactive load ± 3% of setpoint (load power regulation), over all load phase angles, or ± 0.25% of full-rated output, which ever is greater
Load regulation as a function of line regulation Less than 0.1% change in output power for 10% change in AC line voltage
Load regulation as a function of temperature—(performance in accordance with the output power regulation accuracy)
    Ambient air temperature range +5°C to +40°C
    Cooling water temperature range +5°C to +35°C
Spurious outputs - Referenced to fundamental signal at full-rated output when operated in a 50 Ω non-reactive load
    Harmonic related -40 dBc
    Non-harmonic related -50 dBc
Warm up Approximately 2 s from AC-on to RF-on
RF on response time < 7 ms (6.4 ms typical)
Turn-off/decay time 10 μs until output decays to 1% of maximum rated value
Power repeatability ≤ 0.5% over time for same generator for setpoints > 500 W. 1% generator to generator as measured against AE calorimetric standard
Power cycles, standard options - applies to units with options 0 through 5 in PIN position 6. 6 million cycles, 0 to full power into a matched load 360 kilocycles, 0 to full power into high dissipation load
Power cycles w/ DC heating option - DC heating option applies only to units with option 6 or 7 in PIN position 6 30 million cycles, 0 to full power into a matched load 5 million cycles, 0 to full power into high dissipation load
Efficiency (line to load) 60%, typical @ full-rated power, nominal line
Power factor > 0.96
Maximum leakage current 3.5 mA
Master - Slave / CEX (The Apex generator automatically locks the RF output signal phase to the common exciter—CEX—input signal phase when the following conditions are met.)
    Phase relationship (RF output inphase with the CEX input signal) 0° ± 5°
    CEX in
  • Required signal amplitude range of +2 dBm to +10 dBm
  • Generator operating frequency ±0.005%
  • Input impedance of 50 Ω, less than 1.5:1 VSWR
    CEX out
  • Output signal amplitude range of +3 dBm to +7 dBm
  • Generator operating frequency ±0.005%
  • Output impedance of 50 Ω, less than 1.5:1 VSWR
Temperature +35°C (+95°F) - maximum water temperature at minimum flow rate and maximum ambient air temperature (+40° C)
Flow rate - varies according to the option defined by PIN position 2

For ≤ 3kW 7.6 1pm (2 gpm)

For > 3kW 11.4 1pm (3 gpm)
Pressure
    Minimum pressure differential (supply to drain) required to achieve specified minimum flow rates)

For ≤ 3kW 0.9 Bar (13psi)

For > 3kW 2 Bar (29 psi)
    Maximum pressure rating 6.9 Bar (100 psi)
Heat removal 3,410 BTU/hour, 1,000 W at full rated output power 6,825 BTU/hour, 2,000 W at full rated output power 12,500 BTU/hour, 3,660 W at full rated RF output power
Contaminates

The following specifications are recommended for the water used to cool the Apex generator:

  • pH between 7 and 9
  • Total chlorine < 20 ppm
  • Total nitrate < 10 ppm
  • Total sulfate < 100 ppm
  • Total dissolved solids < 250 ppm
  • Total hardness expressed as calcium carbonate equivalent less than 250 ppm
  • Specific resistivity of 2,500 Ω/cm or higher at 25°C
  • Total dissolved solids (TDS) as estimated by the following:
TDS ≤ 640,000 / specific resistivity (Ω/cm)
PIN Position Apex Feature Options, Descriptions & Cross-References
1 Output frequency
  • 0 - N/A
  • 1 - 4 MHz, ± 0.005%
  • 2 - 12.56 MHz, ± 0.005%
  • 3 - 13.56 MHz, ± 0.005%
  • 4 - 27.12 MHz, ± 0.005%
  • 5 - 40.68 MHz, ± 0.005%
2 Power output
  • A - 1,000 W
  • B - 1,500 W
  • C - 2,000 W
  • D - 3,000 W
  • E - 4,000 W
  • F - 5,500 W
  • G - 8,000 W
  • H - 10,000 W
  • J - 5,000 W
  • K - 1,000 HALO
  • L - 1,500 HALO
  • M - 3,500 W
  • N - 7,000 W
3 Input voltage
  • 0 - 208 V nominal, 187 to 229 VAC, 3φ, 47 to 63 Hz, w/ breaker
  • 1 - 400 V nominal, 360 to 440 VAC, 3φ, 47 to 63 Hz, w/ breaker
  • 2 - reserved
  • 3 - 208 V nominal, 187 to 229 VAC, 3φ, 47 to 63 Hz, w/out breaker
  • 4 - 400 V nominal, 360 to 440 VAC, 3φ, 47 to 63 Hz, w/out breaker
  • 5 - 220,208 to 229 VAC, 1 phase, 47/63 Hz w/out breaker
4 Packaging
  • A - frame mount (≤ 5,500 W)
  • B - frame mount w/ rack ears (1/2 rack) (utilities)
  • C - integrated rack mount
  • D - 1/2 integrated rack mount (left)
  • E - 1/2 integrated rack mount (right)
  • F - exclusive option #1
  • G - exclusive option #2
  • H - exclusive option #3
  • J - exclusive option #4
  • K - on board frame mount, opposite end LED’s
  • L - on board frame mount, opposite end LED’s w/ 4 handles
  • M - on board frame mount, opposite end LED’s w/ 2 handles
  • N - frame mount w/ rack ears (1/2 rack) (opposite)
5 Panel
  • 0 - none (on-board, frame mount)
  • 1 - integrated rack mount w/ blank panel
  • 2 - integrated rack mount w/ passive digital display 
  • 3 - N/A
  • 4 - exclusive option #1
6 Serial I/O
  • 0 - default (RS-232 w/ AE Bus)
  • 1 - Multidrop RS-485 w/ AE Bus (currently NOT available)
  • 2 - DeviceNet
  • 3 - Profibus
  • 4 - exclusive option #1
  • 5 - DeviceNet (serial)
  • 6 - exclusive option #3
  • 7 - exclusive option #2
7 Serial Port 2
  • 0 - default (no secondary serial port)
  • 1 - RS 232
  • 2 - RS 485
8 User port options
  • A - no User port
  • B - 25-pin APEX standard 
  • C - 25-pin custom RFG compatible
  • D - 15-pin, exclusive option #2 
  • E - 15-pin, exclusive option #3 
  • F - N/A
  • G - exclusive option #4
9 Output impedance
  • A - 50 Ω
  • B - exclusive option #1
  • C - exclusive option #2
  • D - exclusive option #5
  • E - exclusive option #6
  • F - exclusive option #3
  • G - exclusive option #4
  • H -  exclusive option #7
  • J - exclusive option #8
10 On-board RF output connector location
  • 0 - opposite end from water connections
  • 1 - utilities end (near water connections)
11 Output connector
  • 0 - exclusive option #1
  • 1 - 7/16 connector
  • 2 - SQSTM connector
  • 3 - LC connector
  • 4 - HN
  • 5 - N
  • 6 - exclusive option #2
12 RF measurement
  • 0 - directional coupler
  • 1 - V/I sensor
13 AC power input
  • A - ODU connector
  • B - Non-terminated 3 m, 4-conductor, shielded pigtail
  • C - Non-terminated 12′, 4-conductor, pigtail
  • D - Harting Type Han-Q
  • E - 4-terminal, stud mount
  • F - 15´ 4-conductor, w/ a Hubbell CS8365C plug
  • G - 5´ Harting
  • H - Term 3m, 4 cond, shielded pigtail Marinco 3015P
  • J - 5’ terminated, 4 conductor, SH w/ contact LS1 BF.F6 5+PE (30A)
  • K - ODU connector w/ 20 degree rotation
  • L - Harting Type Han-Q (16A) rotated 180 degrees
  • M - 6’,4 conductor w/ #10 ring lugs on each wire
14 Pulsing
  • 0 - no pulsing
  • 1 - pulsing
15 CEX
  • 0 - default (no CEX)
  • 1 - CEX add
  • 2 - CEX w/ 1 meter cable
16 Water fitting threads
  • 0 - default to 3/8 BSP female (metric threads)
  • 1 - 3/8 NPT female
  • 2 - 3/8 BSP to 1/2" NPT
17 Custom configuration
  • A - standard configurations
  • B - exclusive option #1
  • C - exclusive option #2
  • D - exclusive option #3
  • E - exclusive option #4

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Advanced Energy AE Apex 3013 RF 13.56 MHz Power Generator

Apex 1513
pn. A3L3L000CA140D111A
sn. 290524

Apex 1513
pn. A3L3L000CA140D111A
sn. 208840

Apex 1513
pn. A3L3L000CA140D111A
sn. 227987

Apex 3000/13
missing label

Apex 3000/13
missing label

Apex 3000/13
pn. APEX 3K DISPLAY
sn. none

Apex 3000/13
pn. A3D0G000CF001B001A
sn. 238316

Apex 3000/13
pn. A3D0G000CF001B001A
sn. 182078

Apex 3000/13
pn. A3D0G000CF001B001A
sn. 256765

Apex 3000/13
pn. A3D3G000CJ001H001A
sn. 287265

Apex 3000/13
pn. A3D3G000CJ001H001A
sn. 275585

Apex 3000/13
pn. 0190-19021-001
sn. C554974

Apex 3000/13
pn. 0920-00107-000
sn. 701024

Apex 3000/13
pn. 0920-00107-000
sn. 697956

Apex 3000/13
pn. A3D3G000CJ001H001A
sn. 271259

Apex 3000/13
DAMAGED label

Apex 5513
pn. 3156116-002
sn. 332705

Apex 5513
pn. 3156116-005
sn. 695833

Apex 5513
pn. 3156116-005
sn. 695834

Apex 5513
pn. 3156116-005
sn. 525405

Apex 5513
pn. 3156116-005
sn. C607498

Apex 5500/13
pn. A3F1A060GA110A000A
sn. 209169

Apex 5500/13
pn. A3F1A060GA110A000A
sn. 246384

Apex 5500/13
pn. A3F1A030GA110A000A
sn. 195065

Apex 5500/13
pn. A3F1A060GA110A000A
sn. 233425