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> Advanced Energy AE Apex 3013 RF 13.56 MHz Power Generator
Advanced Energy AE Apex 3013 RF 13.56 MHz Power Generator
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Advanced Energy AE Apex 3013 RF 13.56 MHz Power Generator
The versatile Apex family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.
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| Specifications | Apex 1513 | Apex 3013 | Apex 5513 |
|---|---|---|---|
| Line voltage | |||
| Pin 0 | 208 V nominal, 187 to 229 VAC, three-phase | ||
| Pin 1 | 400 V nominal, 360 to 440 VAC, 3-phase | ||
| Pin 2 | N/A | ||
| Pin 3 | 208 V nominal, 187 to 229 VAC, 3-phase | ||
| Pin 4 | 400 V nominal, 360 to 440 VAC, 3φ | ||
| Line frequency | 47 to 63 Hz | ||
| Line current - Typical A/φ and circuit breaker rating for units with 208 VAC nominal input (PIN position 3, options 0 and 3) | 1,500 W / 13.56 MHz - 9 A/φ; 15 A breaker | 3,000 W / 13.56 MHz - 14 A/φ; 25 A breaker | 5,500 W / 13.56 MHz - 25 A/φ; 40 A breaker |
| Line current - Typical A/φ and circuit breaker rating for units with 400 VAC nominal input (PIN position 3, option 1) | - | 3,000 W / 13.56 MHz - 9 A/φ; 15 A breaker | 5,500 W / 13.56 MHz - 15 A/φ; 25 A breaker |
| Output frequency - varies according to the option defined by PIN position 1 | |||
| Pin 0 | N/A | ||
| Pin 3 | 13.56 MHz, ±0.005% | ||
| Full-rated output power (Minimum into a 50 Ω, nonreactive load) - varies according to the option defined by PIN position 2 | |||
| Pin A | 1,000 W | ||
| Pin B | 1,500 W | ||
| Pin C | 2,000 W | ||
| Pin D | 3,000 W | ||
| Pin E | 4,000 W | ||
| Pin F | 5,500 W | ||
| Pin J | 5,000 W | ||
| Pin K | 1,000 W high accuracy low output (HALO) | ||
| Pin L | 1,500 W HALO minimum into a 50 Ω, non-reactive | ||
| Pin M | 3,500 W | ||
| Output impedance - varies according to the option defined by PIN position 9 | |||
| Pin A | 50 Ω | ||
| Pin B | exclusive option #1 | ||
| Pin C | exclusive option #2 | ||
| Pin D | exclusive option #5 | ||
| Pin E | exclusive option #6 | ||
| Pin F | exclusive option #3 | ||
| Pin G | exclusive option #4 | ||
| Pin H | exclusive option #7 | ||
| Pin J | exclusive option #8 | ||
| Delivered power into 2:1 VSWR loads - varies according to the option defined by PIN position 2 | |||
| Pin B | 1.5 kW = 1,125 W | ||
| Pin D | 3 kW = 2,000 W | ||
| Pin F | 5.5 kW = 3,350 W | ||
| Delivered power into 3:1 VSWR loads - varies according to the option defined by PIN position 2 | |||
| Pin B | 1.5 kW = 650 W | ||
| Pin D | 3 kW = 1,200 W | ||
| Pin F | 5.5 kW = 1,900 W | ||
| Output protection—Apex generators sense and employ several parameters for protection | |||
| Reflected power limit | 20% of maximum forward power for units rated for less than 5,500 W. 1,000 W for 5,500 W units. (PIN position 2 defines the maximum forward power rating for the unit) | ||
| Dissipation limit | Maximum PA dissipation - non-latching alarm LED | ||
| Low/high line bus | Bus voltage outside spec window—latching alarm LED | ||
| Over-temperature | Over-temp condition—latching alarm LED preceded by non-fault warning (user setting) | ||
| Output power range | All generators except the HALO will allow setpoints between 1% and 100% of full scale. The exception is the HALO 1.5k generator depicted by “L” in position 2 of the PIN number. This allows setpoints from 5 W to 1,500 W | ||
| Output power regulation accuracy | |||
| Into 50 Ω non-reactive load |
± 1% of setpoint or ± 0.1% of full-rated output, whichever is greater (all PIN position 2 options but K and L) ≤ ±1% of setpoint or 0.25 W, whichever is greater (PIN position 2, option K & L) |
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| Into 3:1 VSWR nonreactive load | ± 3% of setpoint (load power regulation), over all load phase angles, or ± 0.25% of full-rated output, which ever is greater | ||
| Load regulation as a function of line regulation | Less than 0.1% change in output power for 10% change in AC line voltage | ||
| Load regulation as a function of temperature—(performance in accordance with the output power regulation accuracy) | |||
| Ambient air temperature range | +5°C to +40°C | ||
| Cooling water temperature range | +5°C to +35°C | ||
| Spurious outputs - Referenced to fundamental signal at full-rated output when operated in a 50 Ω non-reactive load | |||
| Harmonic related | -40 dBc | ||
| Non-harmonic related | -50 dBc | ||
| Warm up | Approximately 2 s from AC-on to RF-on | ||
| RF on response time | < 7 ms (6.4 ms typical) | ||
| Turn-off/decay time | 10 μs until output decays to 1% of maximum rated value | ||
| Power repeatability | ≤ 0.5% over time for same generator for setpoints > 500 W. 1% generator to generator as measured against AE calorimetric standard | ||
| Power cycles, standard options - applies to units with options 0 through 5 in PIN position 6. | 6 million cycles, 0 to full power into a matched load 360 kilocycles, 0 to full power into high dissipation load | ||
| Power cycles w/ DC heating option - DC heating option applies only to units with option 6 or 7 in PIN position 6 | 30 million cycles, 0 to full power into a matched load 5 million cycles, 0 to full power into high dissipation load | ||
| Efficiency (line to load) | 60%, typical @ full-rated power, nominal line | ||
| Power factor | > 0.96 | ||
| Maximum leakage current | 3.5 mA | ||
| Master - Slave / CEX (The Apex generator automatically locks the RF output signal phase to the common exciter—CEX—input signal phase when the following conditions are met.) | |||
| Phase relationship (RF output inphase with the CEX input signal) | 0° ± 5° | ||
| CEX in |
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| CEX out |
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| Temperature | +35°C (+95°F) - maximum water temperature at minimum flow rate and maximum ambient air temperature (+40° C) | ||
| Flow rate - varies according to the option defined by PIN position 2 |
For ≤ 3kW 7.6 1pm (2 gpm) For > 3kW 11.4 1pm (3 gpm) |
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| Pressure | |||
| Minimum pressure differential (supply to drain) required to achieve specified minimum flow rates) |
For ≤ 3kW 0.9 Bar (13psi) For > 3kW 2 Bar (29 psi) |
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| Maximum pressure rating | 6.9 Bar (100 psi) | ||
| Heat removal | 3,410 BTU/hour, 1,000 W at full rated output power | 6,825 BTU/hour, 2,000 W at full rated output power | 12,500 BTU/hour, 3,660 W at full rated RF output power |
| Contaminates |
The following specifications are recommended for the water used to cool the Apex generator:
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| PIN Position | Apex Feature | Options, Descriptions & Cross-References |
|---|---|---|
| 1 | Output frequency |
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| 2 | Power output |
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| 3 | Input voltage |
|
| 4 | Packaging |
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| 5 | Panel |
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| 6 | Serial I/O |
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| 7 | Serial Port 2 |
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| 8 | User port options |
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| 9 | Output impedance |
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| 10 | On-board RF output connector location |
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| 11 | Output connector |
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| 12 | RF measurement |
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| 13 | AC power input |
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| 14 | Pulsing |
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| 15 | CEX |
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| 16 | Water fitting threads |
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| 17 | Custom configuration |
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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Advanced Energy AE Apex 3013 RF 13.56 MHz Power Generator A3L3L000CA140D111A Apex 1513 serial # 290524 A3L3L000CA140D111A Apex 1513 serial # 208840 A3L3L000CA140D111A Apex 1513 serial # 227987 APEX 3K DISPLAY Apex 3000/13 A3D0G000CF001B001A Apex 3000/13 serial # 238316 A3D0G000CF001B001A Apex 3000/13 serial # 182078 A3D0G000CF001B001A Apex 3000/13 serial # 256765 A3D3G000CJ001H001A Apex 3000/13 serial # 287265 A3D3G000CJ001H001A Apex 3000/13 serial # 275585 019019021001 / 0190-19021-001 Apex 3000/13 serial # C554974 092000107000 / 0920-00107-000 Apex 3000/13 serial # 701024 092000107000 / 0920-00107-000 Apex 3000/13 serial # 697956 A3D3G000CJ001H001A Apex 3000/13 serial # 271259 3156116002 / 3156116-002 Apex 5513 serial # 332705 3156116005 / 3156116-005 Apex 5513 serial # 695833 3156116005 / 3156116-005 Apex 5513 serial # 695834 3156116005 / 3156116-005 Apex 5513 serial # 525405 3156116005 / 3156116-005 Apex 5513 serial # C607498 A3F1A060GA110A000A Apex 5500/13 serial # 209169 A3F1A060GA110A000A Apex 5500/13 serial # 246384 A3F1A030GA110A000A Apex 5500/13 serial # 195065 A3F1A060GA110A000A Apex 5500/13 serial # 233425
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