Advanced Energy AE Apex 3013 RF Power Generator

The versatile Apex family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based, thin-film processes for semiconductor, flat panel display, or data storage manufacturing.

We have the following Apex 3013 generators in stock:

• A3D3L000BA140A111A
• A3D3L000CA140A121A
• A3D3G000CJ001H001A
• A3D0G000CF001B001A
• A3F1A030GA110A000A
• A3F1A060GA110A000A
• A3S3G000HK001H001A
• 0920-00107-000
• 0920-00139-000
• 0190-19021-001

Digital Manual

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Advanced Energy AE Apex 3013 RF Power Generator

A3D0G000CF001B001A
A3D3G000CJ001H001A
A3D3G000HK001H001A
A3D3L000BA140A111A
A3D3L000BA140A121A
A3D3L000CA140A111A
A3D3L000CA140A121A
A3D5G000HK001H001A
A3D5L000BA140A121A
A3F1A030GA110A000A
A3F1A060GA110A000A
A3F1A0B0GA110A000A
A3F2A000BA120A101A
A3L3L000CA140D111A
A3L5L000BA140A121A
A3L5L000BA140D111A
A7L2A000BA140L011A
A8L2A000BA140L011A
A3L5L000BA140D111A
A7L2A000BA140L011A
A7L2A000BA140L011A
A8L2A000BA140L011A
A3L2A000BA140L011A
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A3D5L000BA140A121A
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A3D2B000GA140A011A
A3D2M000NA140A011A
A3D2B030BA140A001A
A3D5G000HK001U001A
A3D2A000BA140A011A
A3D2A000BA140A111A
A3D2L000BA120R131A
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A3F5L000BA120R131A