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Advanced Energy AE Ovation 2560SF VHF Power Delivery System

90 Day Warranty

Price: $7,000.00
Quantity:
Advanced Energy AE Ovation 2560SF VHF Power Delivery System
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Advanced Energy Ovation AE 2560SF VHF Power Delivery System

The OvationTM fully-integrated, power delivery system enables faster, higher-precision processes, such as those required for demanding narrow-linewidth, dielectric etch processes, through the implementation of a unique power delivery scheme. It is the first to accurately deliver power into a non-50-ohm environment without an external sensor, reacting faster than traditional power supplies. The 60-MHz design reduces voltage potential across the plasma sheath, minimizing ion etch damage, thus improving film quality and yields.

Benefits

  • Broadens process windows
  • Expands process capabilities
  • Improves plasma characteristics
  • Increased etch rate, selectivety and uniformity

Features

  • 2760 W, 60 MHz (contact factory for higher power requirements) * Sweep frequency
  • Non-50 U? measurement capability
  • Analog, RS-232, and Ethernet control options
  • Smaller footprint—half rack option for power up to 2.7 kW * Highly stable and reliable
  • Expert applications support

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Advanced Energy AE Ovation 2560SF VHF Power Delivery System

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