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Advanced Energy AE RFG 3000 RF 13.56 MHz Power Generator

90 Day Warranty

Manufacturer Part Number: 3155038-001
Price: $4,000.00
Quantity:
Advanced Energy AE RFG 3000 RF 13.56 MHz Power Generator
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Advanced Energy AE RFG 3000 RF 13.56 MHz Power Generator

Refurbished with a 90 day warranty. PTB Sales has Advanced Energy AE RFG 3000 power supplies available, model # 3155038-001, In a small package this power supply allows for easy system integration. The RFG 3000 provides power at nearly 6 W per cubic inch. Unit is water cooled, 208 VAC input 3 Phase, 4 wire. 3,000 watts @ 13.56 MHz. Unit is controlled via the 25 Pin Female D sub connector. Factory set at 1 V = 300 watts. Give us a call for options or repair service.

Typical uses include:

  • Plasma Etching/Deposition
  • Reactive Ion Etching
  • RF Sputtering
  • DC Sputter with RF Bias
  • CEX Mode allows two generators to be coupled into the same plasma

Contact us for the refurbishment of your RFG 3000, 3001 or 3002 power supply.

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Advanced Energy AE RFG 3000 RF 13.56 MHz Power Generator

3155038-001  RFG 3000 single breaker
3155038-003  RFG 3000 
3155038-004  RFG 3000 triple breaker
3155038-005  RFG 3000 NOVELLUS

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