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Advanced Energy AE RFPP LF-5 RF Power Supply

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Manufacturer Part Number: 3150012-010
Advanced Energy AE RFPP LF-5 RF Power Supply
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Advanced Energy AE RFPP LF-5 RF Power Supply

The Advanced Energy AE RFPP Low Frequency (LF) variable RF generators delivers reliable power for vacuum environments. They are used for semiconductor applications including inductively coupled vacuum processing and RF sputtering. These variable frequency generators: LF-5, LF-10, LF-20 are the most popular.

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Specifications 5S 10 10S 20S 30S 30H
Power output 500 W 1,000 W 2,000 W 3,000 W
Power control regulation 1% into 50 Ohms
Frequency stability 13.56 MHz +.05%
Repeatability 0.5 Ohms
Harmonic distortion -50 dBc
Noise, hum and ripple -40 dBc at full power
Line voltage (input power) 198 - 250 VAC, 1-phase, 50/60 Hz
Output connectors Type N Type HN
Weight 35 lbs 80 lbs 150 lbs 170 lbs
Water flow (gpm) air 2.5

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Advanced Energy AE RFPP LF-5 RF Power Supply