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Advanced Energy AE VM 5000 AW RF 13.56 MHz Match Network

Manufacturer Part Number: 69000002
Price: $2,850.00
Quantity:
Advanced Energy AE VM 5000 AW RF 13.56 MHz Match Network
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Advanced Energy AE VM 5000 AW RF 13.56 MHz Match Network

Also sold as a package with the Cesar 1330 13.56 MHz RF power generator.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Mounting Directly onto the load or onto a mounting plate.
Size 375 mm x 245 mm x 150 mm (14.75" x 5.9" x 9.65")
Weight 7 kg (15.4 lb)
Connector/cable specifications
Match INTERFACE connector 15-pin subminiature-D female
RF-GENERATOR input connector 50 Ω N-type
PLASMA/LOADconnector Varies by VarioMatch product PN:
  PN 69000009: 7/16 DIN socket
  PN 69001411: 6 mm brass tube fittings
  PN 69000002: M6 bolt
  PNs 69000008, 69001405, 69001407, 69001410, 69001412, 69001413: MC B6N (female 6 mm)
  PN 69001414: MC B20N (female 20 mm)
  PN 69004014: Strap connector
AC power input IEC 320 connector
Coolant connectors Brass water fittings for water tubing 6 mm OD / 4 mm ID (0.24" OD / 0.16" ID)
Internal coil connectors
Tune coil Varies by VarioMatch product PN
  PN 69001413: 2 turns, fixed coil
  PN 69000002: 2.5 turns, fixed coil
  PN 69001412: 4 turns, fixed coil
  PN 69001405: 6 turns, fixed coil
  PN 69001407: 8 turns, fixed coil
  PN 69000008, 69000009, 69001410: 10 turns, fixed coil
  PN 69000039, 69001411, 69001414, 69004014: no tune coil on these ICP units
Load Coil The load coil varies by VarioMatch product part number on the number of turns, the number of possible taps, and the default tap setting from the factory (A, B, or C).

 

  • PN 69000002, 69000039, 69004014: No load coil

 

  • PN 69000008, 69000009, 69001405, 69001407, 69001410, 69001411, 69001412, 69001413: 1 turn, 2 taps, default A
    iClassicLine models 503 kg
    BasicLine models 450 kg
Frequency PN 69000039: 2 MHz or 4 MHz, all other PNs: 13.56 MHz
AC line voltage 100 VAC to 240 VAC, single φ
AC line frequency 50 Hz to 60 Hz
AC line current (maximum) 5000 W
Maximum transfer power 5000 W
Maximum reactive power Varies by VarioMatch product PN:
  PN 69000002, 69004014: 200,000 W
  PN 69000008, 69000009, 69001405, 69001407, 69001410, 69001412, 69001413: 260,000 W
  PN 69000039: 300,000 W
  PN 69001411, 69001414: 325,000 W
Maximum RF load current Varies by VarioMatch product PN
  PN 69000002, 69004014: 50 A
  PN 69000008, 69000009, 69001405, 69001407, 69001410, 69001412, 69001413: 65 A
  PN 69000039: 60 A
  69001411, 69001414: 65 A
Maximum RF load voltage Varies by VarioMatch product PN
  PN 69000039, 69001411, 69001414: 5000 Vpeak
  PNs 69000002. 69000008, 69000009, 69001405, 69001407, 69001410, 69001412, 69001413, 69001414: 4000 Vpeak
Input impedance to generator 50 Ω
Maximum load DC self bias voltage 0 VDC to 4000 VDC

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Advanced Energy AE VM 5000 AW RF 13.56 MHz Match Network

VM 5000 W AW
VM 5000 W ECD

Both have the same specification COMET vacuum capacitors:

CVBA-500BC/7-BEA-L 

CVBA-250AC/15-BEA-L