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Advanced Energy VM 1500 AW-ECD

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Advanced Energy VM 1500 AW-ECD
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Advanced Energy VM 1500 AW-ECD

USED Advanced Energy AE VM 1500 AW-ECD RF 13.56 MHz Match Network

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Mounting Directly onto the load or onto a mounting plate.
Size 375 mm x 245 mm x 150 mm
Weight 6.5 kg
Match INTERFACE connector 15-pin subminiature-D female
RF-GENERATOR input connector 50 Ω N-type
PLASMA/LOAD connector Varies by VarioMatch product PN
  PNs 69002206, 69002207, 69002208: 6 mm brass tube fittings
  PNs 69000004, 69000018, 69000022, 69000024, 69000032, 69000033, 69000037, 69000041, 69000046, 69000062, 69000070, 69000080, 69000114, 69000116, 69000226, 69000227, 69000228, 69000229, 69000230, 69001214: 7/16 DIN socket
  PN 69000001: M6 bolt
  PNs 69000007, 69000023, 69000025, 69000034, 69000036, 69000115, 69000214, 69001207: MC B6N (female 6 mm
  PN 69000082: Customer-supplied
  The connection is located on the rear, side, or bottom panel of the unit.
AC power input (AC- MAINS) connector IEC 320 connector
Coolant connectors Brass water fittings for water tubing 6 mm OD / 4 mm ID (0.24" OD / 0.16" ID)
Load coil Load coil The load coil varies by VarioMatch product part number on the number of turns, the number of possible taps, and the default tap setting from the factory (A, B, or C).
  PN 69000001, 69000062, 69000226, 69002206, 69002207, 69002208: No load coil
  PN 69000004, 69000018, 69000022, 69000023, 69000024, 69000025, 69000046, 69000114, 69000115, 69000214, 69000230, 69000227, 69000229, 69000032, 69000034, 69001207, 69001214: 2 turns, 3 taps, default: B
  PN 6900003, 69000036, 69000037, 69000080, 69000082, 69000116, 69000228: 2 turns, 3 taps, default: C
  PN 69000007, 69000041: 4 turns. 5 taps. default: B
Topology Varies by VarioMatch product PN
  PN 69002206, 69002207, 69002208: L match or Gamma (Default: Gamma)
  PN 69000001: Gamma
  All other PNs: L match
Frequency Varies by VarioMatch product part number.
  PN 69000001, 69000024, 69000025, 69000229, 69001207, 69001214, 69002207: 13.56 MHz
  PN 69000007, 69000041: 2.00 MHz or 4.00 MHz, set at the factory
  PN 69000070, 69002208: 40.68 MHz
AC line voltage 100 VAC to 240 VAC, single φ
AC line frequency 50 Hz to 60 Hz
AC line current (maximum) 1.0 A to 0.7 A
Maximum transfer power 1500 W
Maximum reactive power Varies by VarioMatch product part number:
  PN 69000070, 69000226: 80,000 W
  6PN 69000062: 25 A
  PN 69000001, 69000024, 69000025, 69000229, 69001207, 69001214, 69002207, 69002208: 35 A
  PN 69000007, 69000041: 55 A
Maximum RF load voltage 4000 Vpeak
Input impedance to generator 50 Ω
Maximum load DC self bias voltage 0 VDC to 4000 VDC
DC selfbias monitor voltage 0 V to 10 V
Runtime from start point to end point 3 seconds

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USED Advanced Energy AE VM 1500 AW-ECD RF 13.56 MHz Match Network