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Agilent TwisTorr 84 FS - REBUILT

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Agilent TwisTorr 84 FS - REBUILT
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Agilent TwisTorr 84 FS - REBUILT

Agilent TwisTorr 84 FS Turbomolecular Vacuum Pump - REBUILT

The Agilent TwisTorr 84 FS turbomolecular high-vacuum pump combines TwisTorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extent operating life, minimize system downtime, and assure stability over time. The unique bearing and dry lubrication in the TwisTorr 84 FS eliminate oil and maintenance, and permit operation of the pump in any orientation. Available with on-board or rack controllers.

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Agilent TwisTorr 84 FS

TwisTorr 84 FS 4.5" CF 2.75" CF KF-40
Pumping speed
    N2 67 l/s 56 l/s 49 l/s
    He 63 l/s 46 l/s 38 l/s
    H2 67 l/s 40 l/s 36 l/s
Gas throughput at full rotational speed
    Air cooling (35 degrees celsius) N2: 100 sccm / Ar: 70 sccm
    Water cooling (25 degrees celsius) N2: 100 sccm / Ar: 70 sccm
Compression ratio
    N2 ≥ 1 x 1011
    He 2 x 106
    H2 5 x 104
Base pressure w/ recommended forepump < 5-10 mbar (< 3.75 x 10-10 Torr)
Inlet flange 4.5" CF / 2.75" CF / ISO-63 / KF-40
Foreline flange KF 16 NW
Rotational speed 81,000 rpm (1,350 Hz driving frequency)
Start up time < 2 minutes
Recommended forepump Mech: Agilent DS 42 - DS 102 / Dry: Agilent IDP-3, SH-110
Operating position Any
+5ºC to + 35ºC Any
Operating ambient temperature     +5ºC to + 35ºC
Relative humidity of air 0 - 90%
Bakeout temperature 80ºC at inlet flange max (ISO)
120ºC at inlet flange max (CFF)
Lubricant Permanent lubrication
Cooling requirements
    Air cooling Air flow temperature +5ºC to +35ºC
    Water cooling Cooling water temperature: +15ºC to +25ºC
Minimum flow: 65 l/h (0.30 GPM)


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Agilent TwisTorr 84 FS Turbomolecular Vacuum Pump - REBUILT

X350264000 / X3502-64000  ISO-63
X350264001 / X3502-64001  KF-40
X350264002 / X3502-64002  4.5" CF
X350264003 / X3502-64003  2.75" CF