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Agilent Varian HS-16 Diffusion High Vacuum Pump - REBUILT

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Agilent Varian HS-16 Diffusion High Vacuum Pump - REBUILT
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Agilent Varian HS-16 Diffusion High Vacuum Pump - REBUILT (0164)

The HS-16 diffusion pump comes with full thermal protection and quick-cool coils, and with sight glass/fill and drain assemblies. We also carry Agilent Varian diffusion pump LN2 traps and baffles and valves. 

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Agilent Varian HS-16

Model Number: Type HS-16
0164		 HS-20
0165		 HS-32
0167		 NHS-35
0169
Speed (l/s)
Air 10,000 17,500 32,000 50,000
Hydrogen 12,500 22,000 40,000 62,500
Helium
Normal operating range 1 x 10E-3 to
< 5 x 10E-8 		8 x 10E-4 to < 5 x 10E-8
Untrapped, Torr 1.3 x 10E-3 to
6.5 x 10E-9 		1 x 10-3 to
< 6.5 x 10-8 		1 x 10E-3 to
< 6.5 x 10E-8 		6.5 x 10E-4 to
< 6.5 x 10E-8
Max. fore pressure, Torr
No load 0.65 0.50 0.55
Full load 0.55 0.35 0.40
Max. throughput, @ 1 x 10-2 Torr 12.5 @ 8,100 W 18 35
13.5 @ 9,600 W
Min. recommended backing pump for max. throughput
cfm 80 100 300
Backstreaming rate @ inlet flange
(mg/cm2/min) 1.5 x 10-3 7 x 10-4 5 x 10-4
Warmup time (min) 30 45 30 60
Cooldown time (min) w/ quick cool coil where applicable 60
Fluid charge 3 Qts. (2.8 l) 5 Qts. (4.7 l) 3 Gal. (11.4 l)
Electrical requirements 3-phase
50/60 Hz
240/480 V
Power (watts) 8,100/9,600 12,000 24,000 24,000
Cooling water U.S. gpm @ 60 - 80°F (15 - 26 ) 1.5 1.5 4.0 4.0
Weight (lbs) 500 600 1,500 1,500

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Agilent Varian HS-16 Vacuum Diffusion Pump - REBUILT

79292308 / 79292-308  ASA w/ standard cold cap 240V
79292318 / 79292-318  ASA w/ halo baffle 240V
79292326 / 79292-326  ASA w/ standard cold cap 415V
79292336 / 79292-336  ASA w/ halo baffle 415V
79292319 / 79292-319  ASA w/ standard cold cap 480V
79292319 / 79292-319  ASA w/ halo baffle 480V
L5921308 / L5921-308  ISO w/ standard cold cap 240V
L5921318 / L5921-318  ISO w/ halo baffle 240V
L5921326 / L5921-326  ISO w/ standard cold cap 415V
L5921336 / L5921-336  ISO w/ halo baffle 415V
L5921309 / L5921-309  ISO w/ standard cold cap 480V
L5921319 / L5921-319  ISO w/ halo baffle 480V