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Agilent Varian HS-20 Diffusion High Vacuum Pump - REBUILT

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Manufacturer Part Number: 84341308
Agilent Varian HS-20 Diffusion High Vacuum Pump - REBUILT
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Agilent Varian HS-20 Diffusion High Vacuum Pump - REBUILT

The HS-20 diffusion pump comes with full thermal protection and quick-cool coils, and with sight glass/fill and drain assemblies. We also carry Agilent Varian diffusion pump LN2 traps and baffles and valves. 

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Model Number: Type HS-16
0164
HS-20
0165
HS-32
0167
NHS-35
0169
Speed (l/s)
Air 10,000 17,500 32,000 50,000
Hydrogen 12,500 22,000 40,000 62,500
Helium
Normal operating range 1 x 10E-3 to
< 5 x 10E-8
8 x 10E-4 to < 5 x 10E-8
Untrapped, Torr 1.3 x 10E-3 to
6.5 x 10E-9
1 x 10-3 to
< 6.5 x 10-8
1 x 10E-3 to
< 6.5 x 10E-8
6.5 x 10E-4 to
< 6.5 x 10E-8
Max. fore pressure, Torr
No load 0.65 0.50 0.55
Full load 0.55 0.35 0.40
Max. throughput, @ 1 x 10-2 Torr 12.5 @ 8,100 W 18 35
13.5 @ 9,600 W
Min. recommended backing pump for max. throughput
cfm 80 100 300
Backstreaming rate @ inlet flange
(mg/cm2/min) 1.5 x 10-3 7 x 10-4 5 x 10-4
Warmup time (min) 30 45 30 60
Cooldown time (min) w/ quick cool coil where applicable 60
Fluid charge 3 Qts. (2.8 l) 5 Qts. (4.7 l) 3 Gal. (11.4 l)
Electrical requirements 3 Φ
50/60 Hz
240/480 V
Power (watts) 8,100/9,600 12,000 24,000 24,000
Cooling water U.S. gpm @ 60 - 80°F (15 - 26 ) 1.5 1.5 4.0 4.0
Weight (lbs) 500 600 1,500 1,500

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Agilent Varian HS-20 Diffusion High Vacuum Pump - REBUILT

84341308  ASA w/ standard cold cap
84341318  ASA w/ halo baffle
84341326  ASA w/ standard cold cap
84341336  ASA w/ halo baffle
84341309  ASA w/ standard cold cap
84341319  ASA w/ halo baffle
L5922308  ISO w/ standard cold cap
L5922318  ISO w/ halo baffle
L5922326  ISO w/ standard cold cap
L5922336  ISO w/ halo baffle
L5922309  ISO w/ standard cold cap
L5922319  ISO w/ halo baffle
K1855320  Water-cooled halo baffle
IC160SV  Centering ring for ISO foreline flange, 160K
Factory Special  Quick cool coil 
699901140  Instruction Manual
 

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