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Agilent Varian M2 Diffusion High Vacuum Pump - REBUILT

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Manufacturer Part Number: L6298301
Agilent Varian M2 Diffusion High Vacuum Pump - REBUILT
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Agilent Varian M2 Diffusion High Vacuum Pump - REBUILT

  • High pumping speed and through put in a compact design
  • Fractionating jet purifies fluid
  • High tolerable fore pressure
  • Stainless steel body with 3 stage aluminum jet
  • Full thermal protection
  • Finned boiler increases surface area prolonging fluid life
  • Rotatable inlet flange
  • Corrosion resistant copper/nickel alloy water lines
  • Foreline baffle prevents fluid loss to backing system

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Model M2
0189		 M4
0187		 M6
0188
Speed (l/s)
Air 175 800 1,500
Hydrogen 210 1,000 1,800
Helium
Operating range untrapped, Torr 2 x 10-3 to
< 5 x 10-8		 1 x 10-3 to
< 5 x 10-9
Max. fore pressure, Torr
No load 0.55 0.65 0.70
Full load 0.40 0.45 0.60
Max. throughput
@ 1 x 10-2 Torr-l/s 0.65 1.5 2.4
Min. recommended backing pump for max. throughput
cfm 5 10 11
Backstreaming rate at inlet flange
(mg/cm2/min) 1 x 10-3 1 x 10-4
Warmup time (min) 10 12
Cooldown time (min) w/ quick cool coil where applicable 30 20
Fluid charge 100 cm3 250 cm3 400 cm3
Electrical requirements 1-phase
50/60 Hz
120/240 V
Power (watts) 450 1,190 1,785
Cooling water gpm @ 60 - 80°F (15 - 26) 0.1 0.15 0.2

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Agilent Varian M2 Diffusion High Vacuum Pump - REBUILT

L6298301 L6298-301  ASA w/ standard cold cap 120V
L6298302 L6298-302  ASA w/ standard cold cap 240V