Agilent TwisTorr 84 FS - NEW
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Agilent TwisTorr 84 FS Turbomolecular Vacuum Pump - NEW
The Agilent TwisTorr 84 FS turbomolecular high-vacuum pump combines TwisTorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension system reduces noise and vibration, and ensures optimal bearing operating conditions to extent operating life, minimize system downtime, and assure stability over time. The unique bearing and dry lubrication in the TwisTorr 84 FS eliminate oil and maintenance, and permit operation of the pump in any orientation. Available with on-board or rack controllers.
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|TwisTorr 84 FS||4.5" CF||2.75" CF||KF-40|
|N2||67 l/s||56 l/s||49 l/s|
|He||63 l/s||46 l/s||38 l/s|
|H2||67 l/s||40 l/s||36 l/s|
|Gas throughput at full rotational speed|
|Air cooling (35 degrees celsius)||N2: 100 sccm / Ar: 70 sccm|
|Water cooling (25 degrees celsius)||N2: 100 sccm / Ar: 70 sccm|
|N2||≥ 1 x 1011|
|He||2 x 106|
|H2||5 x 104|
|Base pressure w/ recommended forepump||< 5-10 mbar (< 3.75 x 10-10 Torr)|
|Inlet flange||4.5" CF / 2.75" CF / ISO-63 / KF-40|
|Foreline flange||KF 16 NW|
|Rotational speed||81,000 rpm (1,350 Hz driving frequency)|
|Start up time||< 2 minutes|
|Recommended forepump||Mech: Agilent DS 42 - DS 102 / Dry: Agilent IDP-3, SH-110|
|+5ºC to + 35ºC||Any|
|Operating ambient temperature||+5ºC to + 35ºC|
|Relative humidity of air||0 - 90%|
|Bakeout temperature||80ºC at inlet flange max (ISO)
120ºC at inlet flange max (CFF)
|Air cooling||Air flow temperature +5ºC to +35ºC|
|Water cooling||Cooling water temperature: +15ºC to +25ºC
Minimum flow: 65 l/h (0.30 GPM)
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Agilent TwisTorr 84 FS Turbomolecular Vacuum Pump - NEW X350264000 / X3502-64000 ISO-63 X350264001 / X3502-64001 KF-40 X350264002 / X3502-64002 4.5" CF X350264003 / X3502-64003 2.75" CF