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Agilent Varian VHS-6 Diffusion High Vacuum Pump - REBUILT

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Manufacturer Part Number: 85826316
Agilent Varian VHS-6 Diffusion High Vacuum Pump - REBUILT
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Agilent Varian VHS-6 Diffusion High Vacuum Pump - REBUILT

We also carry Agilent Varian diffusion pump LN2 traps and baffles and valves. 

Specifications VHS-4
0183
VHS-6
0184
VHS-10
0185
Speed (l/s)
Air 1,200 2,400 5,300
Hydrogen 1,600 3,200 7,000
Helium 1,500 3,000 6,600
Normal Operating Range 2 x 10E-3 to
5 x 10E-9
1 x 10E-3 to 5 x 10E-9
Untrapped, Torr 2.6 x 10E-3 to
6.5 x 10E-9
1.3 x 10E-3 to 6.5 x 10E-9
Max. Fore pressure, Torr
No load 0.65
Full load 0.55
Max. Throughput, @ 1 x 10-2 Torr 2.5 3.5 7.7 @ 4,400 W
8.1 @ 5,100 W
Min. Recommended Backing Pump for Max. Throughput
cfm 10 17 30
Backstreaming Rate @ inlet flange
(mg/cm2/min) 5 x 10-4
Warmup Time (min) 10 15
Cooldown Time (min) w/ Quick Cool Coil where applicable 10 25
Fluid Charge 300 cm3 500 cm3 1,000 cm3
Electrical Requirements 1 Φ 3 Φ
50/60 Hz
120/240 V 240/480 V
Power (Watts) 1,450 2,200 4,400/5,100 *
Cooling water gpm @ 60-80°F (15-26 ) 0.15 0.25 0.40

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Agilent Varian VHS-6 Diffusion High Vacuum Pump - REBUILT

85826301 Standard Cold Cap, 2200W, 120V
85826302 Standard Cold Cap, 2200W, 240V Single phase
85826306 Standard Cold Cap, 208V Single phase
85826311 Extension Cold Cap, 2200W, 120V
85826312 Extension Cold Cap, 240V Single phase
85826316 Extension Cold Cap, 208V Single phase
L6193301 ISO, Standard Cold Cap, 120V
L6193302 ISO, Standard Cold Cap, 240V
L6193306 ISO, Standard Cold Cap, 208V
L6193311 ISO, Extended Cold Cap, 120V
L6193312 ISO, Extended Cold Cap, 240V
L6193316 ISO, Extended Cold Cap, 208V
Accessories

86086301: Heater Clamping Plate, VHS-6 & 250 Diffusion Pumps
86087001: Heater Insulator, VHS-6 & 250 Diffusion Pumps
86088001: Heater Cover Plate, VHS-6 & 250 Diffusion Pumps
86643301: Heater Clamp Assembly, VHS-6 & VHS-250 Diffusion Pumps
647306125: Heater, VHS-6/250 Diffusion Pumps, 2200W, 120V
647306175: Heater, VHS-6/250 Diffusion Pumps, 2200W, 208V Single phase
647306225: Heater, VHS-6/250 Diffusion Pumps, 2200W, 240V Single phase
F6455001: Cold Cap, Extended, VHS-6 Diffusion Pump
K0377184: O-Ring Kit for VHS-6 Diffusion Pump
X3901-68002: Heater Wire, 10 AWG, pre-cut 36 inches, for VHS-6/250

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