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ASM

ASMRepair Service Vacuum Pumps ASM

PTB Sales offers vacuum component support for your ASM high vacuum systems - DRAGON® XP8 PECVD, EAGLE® XP8 PEALD, INTREPID™ XP EPITAXY, EPSILON® EPITAXY, ADVANCE® VERTICAL FURNACE, EMERALD® XP ALD. System cores and spare pumps are also available.

Typical spares and service for ASM high vacuum systems: