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Brooks Automation FIXLOAD 6M Wafer Load Port

Manufacturer Part Number: 013096-057-20
Price: $4,500.00
Quantity:
Brooks Automation FIXLOAD 6M Wafer Load Port
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Brooks Automation FIXLOAD 6M Wafer Load Port

FIXLOAD Features:

  • Most accurate and fastest wafer access (6 sec.)
  • BOLTS interface
  • HyBridge OC200 (FIXLOAD 25)
  • Fully SEMI compliant + CE certified
  • Follows I300I guidelines
  • Choice of electronic solution (Basic I/O, CPU Control, Device Net)
  • E84 Parallel I/O
  • Parallel interlocking
  • Single connector interface communication for: E84, Carrier ID and FixMAP
  • Kinematic couplings for proper placement

Optional Features:

  • 13- or 25-wafer capacity
  • Integration of Carrier ID Reader/Writer (IR, RF, Barcode)
  • Safety frame
  • FEOL/BEOL lock out pin
  • Carriage

Benefits:

  • Highest cleanliness (CC 0.01 acc. to Fed. Stand. 209E)
  • Field proven reliability
  • Prepared for customized configurations
  • Easy and seamless integration with process tool
  • Small footprint
  • Easiest maintenance access
  • Ergonomic loading height

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Brooks Automation FIXLOAD 6M Wafer Load Port

FIXLOAD 6M
M/N: 013096-057-20
S/N: 0612-13107

FIXLOAD 6M
M/N: 013096-057-20
S/N: 0606-10025

FIXLOAD 6M
M/N: 013096-505-20
S/N: 0601-11493

FIXLOAD 6M
M/N: 013096-057-20
S/N: 0606-10024

FIXLOAD 6M
M/N: 013096-057-20
S/N: 0606-12291

This product has been refurbished by PTB Sales, Inc. PTB Sales is not affiliated with Brooks Automation, Inc., the Original Equipment Manufacturer. In some cases, PTB Sales uses processes and parts that are different from those used by the OEM, and the OEM expressly disclaims any warranty obligations with respect to this refurbished product.

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