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Brooks Automation MagnaTran 7 Wafer Handling Robot - 003-1500-06

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Manufacturer Part Number: 003-1500-06
Brooks Automation MagnaTran 7 Wafer Handling Robot - 003-1500-06
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Brooks Automation MagnaTran 7 Wafer Handling Robot - 003-1500-06

The Brooks Automation MagnaTran 7 wafer transfer robot is designed for production environments requiring minimum vibration, particle contamination and high throughput.

Wafer sizes 100, 125, 200 and 300mm
Capacity 1.0 kg (2.2 lbs) each end effector
Mounting configuration Top mount flange
Axes of motion 3 axes in cylindrical envelope
Weight ---
Drive assembly 30 kg / 66 lbs
Arm assembly 4-9 kg / 9 - 20 lbs
Vacuum Performance ---
Leak rate < 1 x 10E std. cc/sec He
Base operating pressure 5 x 10-9
Maximum temperature ---
Drive assembly 120 Cº max exposure (mounting flange only), 50 Cº max operation
Arm/End Effector 120 Cº
Input power 24 VDC + 10% -0 at 20 Amp
Repeatability ---
Radial Axis 0.05mm
Rotational Axis 0.003º
Vertical Axis 0.05mm
Placement Repeatability 0.1mm TIR
Wafer Exchange Time 3 to 5 seconds

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Brooks Automation MagnaTran 7 Wafer Handling Robot - 003-1500-06

Serial #'s 0701-12746, 0702-11822, 0702-11825

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