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Brooks CTI-Cryogenics On-Board IS 320FE Vacuum Cryopump - REBUILT

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Brooks CTI-Cryogenics On-Board IS 320FE Vacuum Cryopump - REBUILT
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Brooks CTI-Cryogenics On-Board IS 320FE Vacuum Cryopump - REBUILT

Call for a quote. Ask us for options you would like included e.g. a three phase motor or a Fast Regen module. We also offer one year warranty repair service. View the other On-Board IS models.

Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. The On-Board Network module is included in the price.


  • Regenerates in half the time of a typical Cryo-Torr cryopump.
  • Simultaneous regeneration capability, enabled by networking your cryopumps, to speed the overall system regeneration.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Model On-Board IS 320F On-Board IS 320FE
Integrated hardware Roughing valve
Purge valve
Cryopump TC gauge
1st stage diode
2nd stage diode
1st stage heater
2nd stage heater
RS-232 interface
Pumping speeds H2O 11,000 liters/sec 11,000 liters/sec
N2 3,300 liters/sec 3,600 liters/sec
H2 9,000 liters/sec 12,500 liters/sec
Ar 2,700 liters/sec 3,000 liters/sec
Capacities H2 30 std. liters @ 5 x 10-6 Torr
Crossover 300 Torr-liters
Full Regeneration - cold to cold    
    (with 20 minutes extended purge)    
≤ 150 minutes (1 pump / 1 compressor)
≤ 150 minutes (3 pumps / 1 compressor) with TI = 100K
Fast regeneration ≤ 75 minutes (1 pump / 1 compressor)
≤ 75 minutes (3 pumps / 1 compressor) with TI = 100K
Weight 100 lbs

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Brooks CTI-Cryogenics On-Board IS 320FE/FX Vacuum Cryopump - REBUILT

Please contact us for part number configurations:
8185049G001   8185059G001   8185081G001   8185082G001   8185090G001   8185102G001   8185104G001   8185105G001
8185106G001   8185122G001   8185123G001   8185134G001   8185134G002   8185134G003   8185141G001   8185161G001
8185169G001   8185169G002   8185170G001   8185171G001   8185187G001  

This product has been refurbished by PTB Sales, Inc. PTB Sales is not affiliated with Brooks Automation, Inc., the Original Equipment Manufacturer. In some cases, PTB Sales uses processes and parts that are different from those used by the OEM, and the OEM expressly disclaims any warranty obligations with respect to this refurbished product.

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