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BUSCH COBRA DS 0160 Dry Screw Vacuum Pump - REBUILT

COBRA single-stage dry screw vacuum pump range takes advantage of the dry screw pump technology to maximize product uptime. The advanced single-stage, swept-volume design of our COBRA line of dry screw pumps allows for fewer moving parts, longer up-time between service, and lower nitrogen consumption than conventional multistage compression vacuum pumps. The COBRA line is ideally suited for all harsh processes, that are found in the semiconductor industry of today and tomorrow.

The COBRA DS series is well prepared for advanced monitoring, containing all features of a modern semiconductor vacuum pump. Naturally, it also comes with the twin screw technology. Electric and electronic components and controls are of state of the art.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Pumping speed 60 Hz (50 Hz) 112 cfm (93 cfm) / 190 m3/h (158 m3/h)
Base pressure 0.75 x 10-2 Torr / 1 x 10-2 hPa
Rotation speed 60 Hz (50 Hz) 7,200 min-1 (6,000 min-1)
Inlet/outlet connection DN 40 ISO-K
Weight 338 kg
Noise level 68 dB(A)
Power supply 200-230 V / 346-400 V
COBRA motor 60 Hz (50 Hz) 4.40 kW (4.0 kW)
Oil capacity 1.6 l
Oil type PFPE
Cooling water connection, quick coupler 3/8" NPT
Pressure (max) 5 bar
Pressure dif. (min) 2 bar
Flow (min) 2 l/min
Water temperature 20°C
Nitrogen overpressure seal flow 1.5 bar
Nitrogen dilution flow (process dependent)     0-18 l/min

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BUSCH COBRA DS 0160 Dry Screw Vacuum Pump - REBUILT