CHA SE-1000 High Vacuum Deposition System
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CHA SE-1000 High Vacuum Deposition System
The largest of the SE/SEC-Series, the SE-1000, is typically equipped with a 25.5" diameter, water-cooled bell jar, a 26" diameter stainless steel baseplate, and Planetary Fixturing holding up to thirty six 4" wafers. One Button Automation and Lift-Off Fixturing are among the most popular options added to the system.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Ultimate vacuum | 10-8 Torr range |
| Cryogenic pump | 10" |
| Mechanical pump | 23-57 cfm, dual stage |
| Cold trap | 3.7 liter capacity, 250 sq. inches of surface area, 10 hours holding time |
| Water baffle | Optically dense, chevron baffle |
| High vacuum valve | 113/4" I.D., seals vertically |
| Foreline / roughing valves | 3" I.D. |
| Valve actuation | Electro-pneumatic (all vacuum valves) |
| Valve sequencing | Manual and automatic (Auto-Tech II) |
| Ionization gauge control | Dual ionization gauge tube, auto ranging with dual convectron positions |
| Dimensions | 79" H x 43" W x 37" D |
| Weight | 1,500 lbs. |
| Electrical | 208/30/70A/5-wire connection with ground |
| Water | 10 gpm (minimum) |
| Air | 90-110 psig |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
CHA SE-1000 High Vacuum Deposition System
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