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CHA SE-1000 High Vacuum Deposition System

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CHA SE-1000 High Vacuum Deposition System
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CHA SE-1000 High Vacuum Deposition System

The largest of the SE/SEC-Series, the SE-1000, is typically equipped with a 25.5" diameter, water-cooled bell jar, a 26" diameter stainless steel baseplate, and Planetary Fixturing holding up to thirty six 4" wafers. One Button Automation and Lift-Off Fixturing are among the most popular options added to the system.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Ultimate vacuum 10-8 Torr range
Cryogenic pump 10"
Mechanical pump 23-57 cfm, dual stage
Cold trap 3.7 liter capacity, 250 sq. inches of surface area, 10 hours holding time
Water baffle Optically dense, chevron baffle
High vacuum valve 113/4" I.D., seals vertically
Foreline / roughing valves     3" I.D.
Valve actuation Electro-pneumatic (all vacuum valves)
Valve sequencing Manual and automatic (Auto-Tech II)
Ionization gauge control Dual ionization gauge tube, auto ranging with dual convectron positions
Dimensions 79" H x 43" W x 37" D
Weight 1,500 lbs.
Electrical 208/30/70A/5-wire connection with ground 
Water 10 gpm (minimum)
Air 90-110 psig 

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

CHA SE-1000 High Vacuum Deposition System

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