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CHA SEC-1000-RAP Thermal CIGS Co-Evaporation System

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CHA SEC-1000-RAP Thermal CIGS Co-Evaporation System
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CHA SEC-1000-RAP Thermal CIGS Co-Evaporation System

CHA Industries SEC-1000-RAP Thermal CIGS Co-Evaporation System, serial # 1576-3971, 208V, 3ph, 60Hz, 100A, with:

  • Pfeiffer TPH-1501-U-P-N turbomolecular pump with OPS-900 PSU and TC-750 controller
  • INFICON 782-900-035 Guardian opt filter (x3)
  • CHA Auto-Tech II controller, shutter controller, planetary rotation controller, LN2 controller, heater power supply, cryo rough pressure controller, resistance power supply (x2)
  • Granville-Phillips 307 dual ion gauge, dual convection gauge vacuum gauge controller
  • Kurt J. Lesker KJLC-615 vacuum gauge
  • Kurt J. Lesker M.A.P.S. power supplies (x4)
  • INFICON EIES-IV Guardian controller
  • Omega TC-08 temperature transmitter
  • J-Kem 210 temp controller
  • Omega benchtop controller
  • Pfeiffer DCU-002 controller

System configured similar to NREL and other research institutions to deposit world record CIGS (CuIn1−xGaxSe2 / copper indium gallium selenide)  devices by 3-stage co-evaporation. CHA pumping platform with 32" water-cooled chamber. Guardian EIES rate controller with Cu, In and Ga PMTs, filters, fiber optic cable, and sensor. Heated water circulation to avoid water condensation during system maintenance. Turbo pumped with LN2 cold trap. Separate pumps for foreline and roughing. Substrate temperature monitoring for reaction endpoint detection used by NREL, ZSW, and EMPA to achieve world record devices. Custom user interface with CIGS recipes used to achieve consistent CIGS devices with >18% efficiency provided with the system.


  • Edwards 2-stage vacuum pump
  • Haake B3/DC3 recirculator

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Bell jar 32" diameter chamber
Ultimate vacuum 10-8 Torr range
Cryogenic pump 10"
Mechanical pump 23-57 cfm, dual stage
Cold trap 3.7 liter capacity, 250 sq. inches of surface area, 10 hours holding time
Water baffle Optically dense, chevron baffle
High vacuum valve 113/4" I.D., seals vertically
Foreline / roughing valves     3" I.D.
Valve actuation Electro-pneumatic (all vacuum valves)
Valve sequencing Manual and automatic (Auto-Tech II)
Ionization gauge control Dual ionization gauge tube, auto ranging with dual convectron positions
Dimensions 79" H x 43" W x 37" D
Weight 1,500 lbs.
Electrical 208/30/70A/5-wire connection with ground 
Water 10 gpm (minimum)
Air 90-110 psig 

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CHA SEC-1000-RAP Thermal CIGS Co-Evaporation System