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EBARA A07V Dry Vacuum Pump - REBUILT

Price: $4,750.00
Quantity:
EBARA A07V Dry Vacuum Pump - REBUILT
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EBARA A07V Dry Vacuum Pump - REBUILT

Technical Characteristics

  • Complete pump safeguard system
  • High pump operating temperature preventing condensation
  • Low noise and low vibration
  • Corrosion resistant materials-stainless steel coolers, water circuits
  • High reliability even for harsh processes
  • Efficient interstage coolers for LPCVD nitride process
  • Canned motor
  • Low service requirements
  • Control panel for monitoring operating conditions

Customer Benefits

  • Very low nitrogen consumption for purging
  • Clean room compatible
  • Low service requirements
  • Compact size and small footprint

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Model A25S A10S A07V
Pumping speed (50 / 60 Hz) 2,500 / 3,000 L/min 1,000 / 1,200 L/min 700 / 840 L/min
Ultimate pressure (50 / 60 Hz) 5.3 / 4.0Pa 1.1 / 1.0 Pa
Connection Gas inlet NW50 NW40
Gas outlet NW40
Motor 2P 3.7 kW 2P 2.2 kW 2P 1.5 kW
Cooling water Connection Coupler (Rc 3/8)
Pressure [gauge press.] Supply: Max. 0.4 MPa, Differential press.: Min. 0.1 MPa
Flow rate Min. 3.5 L/min
Temperature Max. 30°C
N2 Gas Connection 1/4” tube fitting (same as Swagelok®)
Pressure [gauge press.] Supply: 0.1-0.7 MPa, Setting: 0.04-0.07 MPa
Approx. flow rate 17-20 Pa m3/s [3.4 Pa m3/s] 15-19 Pa m3/s [3.4 Pa m3/s]
Duct ventilation Connection d50 mm x L50 mm d50 mm x L60 mm
Pressure -196 Pa
Approx. flow rate 0.5 m3/min
Lubrication Oil Brand FOMBLIN Y-L VAC 25/6 BARRIERTA J100 DEMNUM S-65 KRYTOX VPF 1525
Quantity 0.4 L 0.5 L
Approx. weight 240 kg 220 kg 150 kg
Power supply Phase/volt/freq. 3 Phase, 200V (50 Hz), 200-220 V (60Hz)
Current rating (50 / 60 Hz) 18.3 / 17.5 A 11.7 / 11.1 A 8.4 / 8.6 A
Connection MS Series 22-22 MS Series 20-4
(Japan Aviation Electronics Industry)
Control signal 57 Series 50 (DDK. Ltd)

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

EBARA A07V Dry Vacuum Pump - REBUILT

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