EBARA A10S Dry Vacuum Pump - REBUILT
Manufacturer Part Number: A017200, A017441
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EBARA A10S Multi-Stage Dry Vacuum Pump - REBUILT
Technical Characteristics
- Complete pump safeguard system
- High pump operating temperature preventing condensation
- Low noise and low vibration
- Corrosion resistant materials-stainless steel coolers, water circuits
- High reliability even for harsh processes
- Efficient interstage coolers for LPCVD nitride process
- Canned motor
- Low service requirements
- Control panel for monitoring operating conditions
Customer Benefits
- Very low nitrogen consumption for purging
- Clean room compatible
- Low service requirements
- Compact size and small footprint
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Model | A25S | A10S | A07V | |
|---|---|---|---|---|
| Pumping speed (50 / 60 Hz) | 2,500 / 3,000 L/min | 1,000 / 1,200 L/min | 700 / 840 L/min | |
| Ultimate pressure (50 / 60 Hz) | 5.3 / 4.0Pa | 1.1 / 1.0 Pa | ||
| Connection | Gas inlet | NW50 | NW40 | |
| Gas outlet | NW40 | |||
| Motor | 2P 3.7 kW | 2P 2.2 kW | 2P 1.5 kW | |
| Cooling water | Connection | Coupler (Rc 3/8) | ||
| Pressure [gauge press.] | Supply: Max. 0.4 MPa, Differential press.: Min. 0.1 MPa | |||
| Flow rate | Min. 3.5 L/min | |||
| Temperature | Max. 30°C | |||
| N2 Gas | Connection | 1/4” tube fitting (same as Swagelok®) | ||
| Pressure [gauge press.] | Supply: 0.1-0.7 MPa, Setting: 0.04-0.07 MPa | |||
| Approx. flow rate | 17-20 Pa m3/s [3.4 Pa m3/s] | 15-19 Pa m3/s [3.4 Pa m3/s] | ||
| Duct ventilation | Connection | d50 mm x L50 mm | d50 mm x L60 mm | |
| Pressure | -196 Pa | |||
| Approx. flow rate | 0.5 m3/min | |||
| Lubrication Oil | Brand | FOMBLIN Y-L VAC 25/6 BARRIERTA J100 DEMNUM S-65 KRYTOX VPF 1525 | ||
| Quantity | 0.4 L | 0.5 L | ||
| Approx. weight | 240 kg | 220 kg | 150 kg | |
| Power supply | Phase/volt/freq. | 3 Phase, 200V (50 Hz), 200-220 V (60Hz) | ||
| Current rating (50 / 60 Hz) | 18.3 / 17.5 A | 11.7 / 11.1 A | 8.4 / 8.6 A | |
| Connection | MS Series 22-22 | MS Series 20-4 | ||
| (Japan Aviation Electronics Industry) | ||||
| Control signal | 57 Series 50 (DDK. Ltd) | |||
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
EBARA A10S Multi-Stage Dry Vacuum Pump - REBUILT
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