EBARA A10S Dry Vacuum Pump

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EBARA A10S Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: A017200, A017441

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EBARA A10S Dry Vacuum Pump - REBUILT

Technical Characteristics

Complete pump safeguard system
High pump operating temperature preventing condensation
Low noise and low vibration
Corrosion resistant materials-stainless steel coolers, water circuits
High reliability even for harsh processes
Efficient interstage coolers for LPCVD nitride process
Canned motor
Low service requirements
Control panel for monitoring operating conditions

Customer Benefits

Very low nitrogen consumption for purging
Clean room compatible
Low service requirements
Compact size and small footprint

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Model		A25S	A10S	A07V
Pumping speed (50 / 60 Hz)		2,500 / 3,000 L/min	1,000 / 1,200 L/min	700 / 840 L/min
Ultimate pressure (50 / 60 Hz)		5.3 / 4.0Pa		1.1 / 1.0 Pa
Connection	Gas inlet	NW50	NW40
Connection	Gas outlet	NW40
Motor		2P 3.7 kW	2P 2.2 kW	2P 1.5 kW
Cooling water	Connection	Coupler (Rc 3/8)
	Pressure [gauge press.]	Supply: Max. 0.4 MPa, Differential press.: Min. 0.1 MPa
	Flow rate	Min. 3.5 L/min
	Temperature	Max. 30°C
N2 Gas	Connection	1/4” tube fitting (same as Swagelok®)
	Pressure [gauge press.]	Supply: 0.1-0.7 MPa, Setting: 0.04-0.07 MPa
	Approx. flow rate	17-20 Pa m³/s [3.4 Pa m³/s]		15-19 Pa m³/s [3.4 Pa m³/s]
Duct ventilation	Connection	d50 mm x L50 mm		d50 mm x L60 mm
	Pressure	-196 Pa
	Approx. flow rate	0.5 m³/min
Lubrication Oil	Brand	FOMBLIN Y-L VAC 25/6 BARRIERTA J100 DEMNUM S-65 KRYTOX VPF 1525
Lubrication Oil	Quantity	0.4 L		0.5 L
Approx. weight		240 kg	220 kg	150 kg
Power supply	Phase/volt/freq.	3 Phase, 200V (50 Hz), 200-220 V (60Hz)
	Current rating (50 / 60 Hz)	18.3 / 17.5 A	11.7 / 11.1 A	8.4 / 8.6 A
	Connection	MS Series 22-22	MS Series 20-4
	Connection	(Japan Aviation Electronics Industry)
Control signal		57 Series 50 (DDK. Ltd)

Digital Manual

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