Home > Vacuum Pumps > Dry > EBARA > A Series - REBUILT > EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT
Email Link Tweet This Share on Facebook

EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT

Price: $10,100.00
Quantity:
EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT
Click Image to Enlarge

EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT

Technical Characteristics

  • Complete pump safeguard system
  • High pump operating temperature preventing condensation
  • Low noise and low vibration
  • Corrosion resistant materials-stainless steel coolers, water circuits
  • High reliability even for harsh processes
  • Efficient interstage coolers for LPCVD nitride process
  • Canned motor
  • Low service requirements
  • Control panel for monitoring operating conditions

Customer Benefits

  • Very low nitrogen consumption for purging
  • Clean room compatible
  • Low service requirements
  • Compact size and small footprint
Pumping speed (N2) 50/60 Hz     3,000 / 3,600 l/min
Pumping speed (N2) 50/60 Hz 180 / 216 m3/h
Ultimate pressure 50/60 Hz  4 x 10-3 / 3 x 10-3 mbar
Ultimate pressure 50/60 Hz 0.4 / 0.3 Pa
Water consumption 3.5 l/min
Nitrogen consumption     10-13 slm
Nitrogen consumption 17-22 Pa m3/sec
Voltages ranges 200-220/380-415 V
Motor power, installed 1.5+2.2 kW
Weight, approx. 330 kg
Dimensions 895 x 400 x 485 mm
Inlet flange size DN 50 KF
Outlet flange size DN 40 KF

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT

Product Reviews

There are currently no customer reviews for this product.

Be the first to write a review!
We value your opinion. Please take a moment and share what you like or don't like about a product.

Write a review now