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Manufacturer Part Number: 811-0070-2-000-00-00
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EBARA A70W Multi-Stage Dry Vacuum Pump - REBUILT

Technical Characteristics

  • Complete pump safeguard system
  • High pump operating temperature preventing condensation
  • Low noise and low vibration
  • Corrosion resistant materials-stainless steel coolers, water circuits
  • High reliability even for harsh processes
  • Efficient interstage coolers for LPCVD nitride process
  • Canned motor
  • Low service requirements
  • Control panel for monitoring operating conditions

Customer Benefits

  • Very low nitrogen consumption for purging
  • Clean room compatible
  • Low service requirements
  • Compact size and small footprint

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!


Pumping speed (N2) 50/60 Hz     7,000 / 8,400 l/min
Pumping speed (N2) 50/60 Hz 420 / 504 m3/h
Ultimate pressure 50/60 Hz 3 x 10-3 / 1.3 x 10-3 mbar
Ultimate pressure 50/60 Hz 0.3 / 0.13 Pa
Water consumption 3.5 l/min
Nitrogen consumption     14-16 slm
Nitrogen consumption 24-27 Pa m3/sec
Voltages ranges 200-220/380-415 V
Motor power, installed 2.2+3.7 kW
Weight, approx. 380 kg
Dimensions 825 x 400 x 760 mm
Inlet flange size DN 50 KF
Outlet flange size DN 40 KF

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

EBARA A70W Multi-Stage Dry Vacuum Pump - REBUILT