EBT Series - NEW
The EBT Series turbomolecular pump line compliments EBARA's existing offering of turbomolecular pump systems. The EBT Series are a highly efficient cost effective solution to your high vacuum pumping needs. EBARA's EBT Series turbomolecular pumps offer ceramic bearing, which provides for a clean, reliable vacuum for today's high tech manufacturing, semiconductor, thin film, and photovoltaic industries. The EBT Series pumps can be mounted in any orientation and have tuning free half rack controllers requiring no battery backup. The EBT Series offers three major types of turbomolecular pumps cooling: naturally cooled, fan cooled and water cooled. EBARA also offers the EBT turbomolecular pumps with an optional On-Board controller.