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EBARA EBT1400 Turbo Vacuum Pump - NEW

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Manufacturer Part Number: EBT1400FCAB
EBARA EBT1400 Turbo Vacuum Pump - NEW
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EBARA EBT1400 Turbomolecular Vacuum Pump - NEW

The EBT Series consists of mechanical bearing compound turbomolecular pumps, which compliment EBARA’s existing line of EMT MagLev turbomolecular pumps. The EBT series of turbo pumps are highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high tech manufacturing requirements.

The compound turbo pumps in the EBT Series can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high-volume light gas compression, making them ideal for UHV and analytical systems. The EBT70 and EBT240 pumps are available with an optional integrated controller.

All EBARA compound turbomolecular pumps are available with either water or fan cooling, and the EBT70 is available with convection cooling.

Features & Benefits

  • Grease lubricated ball bearing type
  • Wide pumping speed variations from 70 to 2,400 L/s
  • Compact, light weight, low cost
  • Integrated controller types available (for Models EBT70 and EBT240 only)
  • Shock-resistant
  • Air-cooled and water-cooled types available (air cooled only for Models EBT70F and EBT240F)
  • Can be set in any direction
  • Network connection available
  • Compliant with CE marking , SEMI S2 & NRTL

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange CF200
Outlet flange KF40
Volume flow rate
    N2 (l/s) 1,400
    N2 w/ protective screen (l/s) 1,300
    H2 (l/s) 750
Maximum compression ratio
    N2 1 x 108
    H2 4.3 x 103
Ultimate pressure < 7.5 x 10-9 Torr (< 1 x 10-6 Pa)
Maximum throughput
    N2 (sccm) 450
    N2 (Pa x l/s) 830
    Ar (sccm) 250
    Ar (Pa x l/s) 460
Maximum backing pressure 2.5 Torr (330 Pa)
Recommended backing pump ≥ 250 l/min (≥ 8.8 cfm)
Startup time 5.5 - 7 min
Shutdown time 15 - 18 min
Vibration level (0 - peak) ≤ 0.2 μm
Rated rotational speed 33,600 min-1
Installation position Any
Cooling system Forced air cooling
Bearing system Grease-lubricated ball bearing
Permissible ambient temperature     10 - 32°C (50 - 90°F)
Major materials Al Alloy
Weight 30 kg (66.1 lbs)
Bearing life 30,000 hours

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

EBARA EBT1400 Turbomolecular Vacuum Pump - NEW

EBT1400FCAB  1,400 l/s CF200 air cooled
EBT1400FBAB  1,400 l/s ISO-B200 air cooled
EBT1400FCWB  1,400 l/s CF200 water cooled
EBT1400FBWB  1,400 l/s ISO-B200 water cooled