EBARA EBT70 Integrated Turbo Vacuum Pump - NEW
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EBARA EBT70 Integrated Controller Turbomolecular Vacuum Pump - NEW
The EBT Series consists of mechanical bearing compound turbomolecular pumps, which compliment EBARA’s existing line of EMT MagLev turbomolecular pumps. The EBT series of turbo pumps are highly efficient, cost effective solutions that provide clean and reliable vacuum generation for your high tech manufacturing requirements.
The compound turbo pumps in the EBT Series can be mounted in any orientation and are ideal for mobile applications. These pumps offer high pumping speed and high-volume light gas compression, making them ideal for UHV and analytical systems. The EBT70 and EBT240 pumps are available with an optional integrated controller.
All EBARA compound turbomolecular pumps are available with either water or fan cooling, and the EBT70 is available with convection cooling.
Features & Benefits
- Grease lubricated ball bearing type
- Wide pumping speed variations from 70 to 2,400 L/s
- Compact, light weight, low cost
- Integrated controller types available (for Models EBT70 and EBT240 only)
- Air-cooled and water-cooled types available (air cooled only for Models EBT70F and EBT240F)
- Can be set in any direction
- Network connection available
- Compliant with CE marking , SEMI S2 & NRTL
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Volume flow rate|
|N2 w/ protective screen (l/s)||70|
|Maximum compression ratio|
|N2||1 x 108|
|H2||1 x 105|
|Ultimate pressure||< 7.5 x 10-10 Torr (< 1 x 10-7 Pa)|
|N2 (Pa x l/s)||18|
|Ar (Pa x l/s)||9.2|
|Maximum backing pressure||9 Torr (1,200 Pa)|
|Recommended backing pump||≥ 25 l/min (≥ 0.8 cfm)|
|Startup time||2 - 2.5 min|
|Shutdown time||20 - 25 min|
|Vibration level (0 - peak)||≤ 0.2 μm|
|Rated rotational speed||90,000 min-1|
|Cooling system||Free convection air cooling|
|Bearing system||Grease-lubricated ball bearing|
|Permissible ambient temperature||8 - 38°C (46 - 100°F)|
|Major materials||Al Alloy|
|Weight||5 kg (11 lbs)|
|Bearing life||20,000 hours|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
EBARA EBT70 Integrated Controller Turbomolecular Vacuum Pump - NEW EBT70FCNB 70 l/s CF63 air cooled EBT70FRNB 70 l/s ISO-R63 air cooled EBT70FCAB 70 l/s CF63 air cooled EBT70FRAB 70 l/s ISO-R63 air cooled EBT70FCNB-20 70 l/s CF63 air cooled EBT70FRNB-20 70 l/s ISO-R63 air cooled EBT70FCAB-20 70 l/s CF63 air cooled EBT70FRAB-20 70 l/s ISO-R63 air cooled
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