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EBARA EMT1300 Magnetically Levitated Turbomolecular Vacuum Pump - REBUILT

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.

The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-B200 / CF200
Outlet flange NW40
Volume flow rate
    N2 (l/s) 1,300
    N2 w/ protective screen (l/s) 1,230
    H2 (l/s) 1,200
Maximum compression ratio
    N2 1 x 108
    H2 1.5 x 104
Ultimate pressure < 7.5 x 10-9 Torr (< 1 x 10-6 Pa)
Allowable outlet pressure 3.8 Torr (500 Pa)
Maximum throughput
    N2 (sccm) 3,000
    N2 (Pa x l/s) 5,520
    Ar (sccm) 1,500
    Ar (Pa x l/s) 2,760
Revolution speed 33,600 rpm
Startup time 4 - 5 min
Shutdown time 4 - 5 min
Installation position Any
Vibration level (0 - peak) < 0.005 μm
Pump bake out temperature     max 120°C
Bearing system 5-axis magnetic bearing
Cooling system Water/air
Cooling water flow rate 1.5 l/min
Recommended backing pump     ≥ 250 l/min
N2 gas throughput for purging 20 sccm (36.8 Pa-l/sec)
Weight 75 / 92 kg (34 / 42 lbs)

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EBARA EMT1300 Magnetically Levitated Turbomolecular Vacuum Pump - REBUILT