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EBARA EMT3260 Mag Lev Turbo Vacuum Pump - NEW

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EBARA EMT3260 Mag Lev Turbo Vacuum Pump - NEW
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EBARA EMT3260 Magnetically Levitated Turbomolecular Vacuum Pump - NEW

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.

The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-B320
Outlet flange NW40
Volume flow rate
    N2 (l/s) 3,200
    N2 w/ protective screen (l/s) 3,000
    H2 (l/s) 2,700
Maximum compression ratio
    N2 1 x 108
    H2 3 x 104
Ultimate pressure < 7.5 x 10-9 Torr (< 1 x 10-6 Pa)
Allowable outlet pressure 3 Torr (400 Pa)
Maximum throughput
    N2 (sccm) 2,000
    N2 (Pa x l/s) 3,680
    Ar (sccm) -
    Ar (Pa x l/s) -
Revolution speed -
Startup time -
Shutdown time -
Installation position Any
Vibration level (0 - peak) -
Pump bake out temperature     -
Bearing system 5-axis magnetic bearing
Cooling system Water/air
Cooling water flow rate -
Recommended backing pump     ≥ 1,500 l/min
N2 gas throughput for purging -
Weight 80 / 96 kg (176 / 211 lbs)

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EBARA EMT3260 Magnetically Levitated Turbomolecular Vacuum Pump - NEW