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EBARA EMT420 Mag Lev Turbo Vacuum Pump - NEW

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EBARA EMT420 Mag Lev Turbo Vacuum Pump - NEW
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EBARA EMT420 Magnetically Levitated Turbomolecular Vacuum Pump - NEW

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.

The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange ISO-B160 / CF160
Outlet flange NW25
Volume flow rate
    N2 (l/s) 400
    N2 w/ protective screen (l/s) 370
    H2 (l/s) 300
Maximum compression ratio
    N2 1 x 108
    H2 4.5 x 103
Ultimate pressure < 7.5 x 10-9 Torr (< 1 x 10-6 Pa)
Allowable outlet pressure 3 Torr (400 Pa)
Maximum throughput
    N2 (sccm) 2,000
    N2 (Pa x l/s) 3,680
    Ar (sccm) 700
    Ar (Pa x l/s) 1,290
Revolution speed 40,800 rpm
Startup time 2 - 3 min
Shutdown time 4 - 5 min
Installation position Any
Vibration level (0 - peak) < 0.01 μm
Pump bake out temperature     max 120°C
Bearing system 5-axis magnetic bearing
Cooling system Water/air
Cooling water flow rate 1.5 l/min
Recommended backing pump     ≥ 160 l/min
N2 gas throughput for purging 10 sccm (18.4 Pa-l/sec)
Weight 14 / 17 kg (30 / 37 lbs)

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

EBARA EMT420 Magnetically Levitated Turbomolecular Vacuum Pump - NEW

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