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EBARA ESR20N Dry Vacuum Pump - REBUILT

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EBARA ESR20N Dry Vacuum Pump - REBUILT
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EBARA ESR20N Dry Vacuum Pump - REBUILT

The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 CFM with an ultimate pressure as low as 1 mTorr.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Pumping speed 50/60 Hz 46 / 71 cfm
1,300 / 2,000 l/min
78 / 120 m3/hr
Ultimate pressure 50/60 Hz 5 mTorr
0.67 Pa
0.0067 mBar
Gas inlet connection NW 40
Gas outlet connection NW 40
Power at ultimate pressure 0.55 - 0.70 kW
Maximum power 2.5 kW
Cooling water requirements, min. flow rate     2 l/min
Bearing and dilution N2, bearing seals 0 - 12 l/min
Cabinet dimensions, L x W x H 25 x 11 x 12.6 in
635 x 280 x 320 mm
Weight 200 lbs
90 kg

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EBARA ESR20N Dry Vacuum Pump - REBUILT

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