These EBARA turbomolecular pumps offer full magnetic levitation, which provides for a clean, reliable vacuum. The ET Series features a five axis magnetic bearing with two styles of rotor: high compression (ET-H) and a wide range corrosion resistant (e.g. ET-1600WS). The ET-WS pumps also offers a temperature controlled model, ET-WS-A for etching applications.

The EBARA ET-W turbo pump gives a wide pressure range and a large allowable back pressure (3 Torr) enabling simplification of foreline exhaust system. Anti corrosion models provide superior durability to all reactive gasses. The temperature controlled models provide less build-up of chemicals.

View our inventory of EBARA turbo controllers. We also offer repair service.