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EBARA ET1600W Turbomolecular Vacuum Pump - REBUILT

Price: $10,500.00
Quantity:
EBARA ET1600W Turbomolecular Vacuum Pump - REBUILT
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EBARA ET1600W / WS Turbomolecular Vacuum Pump - REBUILT

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Model ET300W   ET450W   ET600W   ET800W   ETE801H   ET1301W   ET1600W  
Pumping Speed, L/s N2 320 460 600 770 800 1,300 1,600
H2 200 300 220 450 550 900 1,000
Max. compression, L/s N2 > 109 > 109 > 109 > 109 > 109 > 108 > 109
H2 7 x 103 5 x 103 104 2 x 106 2 x 103 104
Ultimate pressure, Pa 10-7 order 10-9 order 10-7 order
Allowable outlet pressure, Pa 400 40 266 400
Flange standard Inlet side * 1 VG150 VG200 VG250
Outlet size KF25 KF40
Run-up time in vacuum, min 6 7 8 6 8
Revolution, min-1 48,000 45,000 35,000 36,000 38,000 32,000 30,000
Installation position Any
Vibration level (at rated speeds) µm (0-P) < 0.01
Cooling system Water cooling
Cooling water flow rate, L/min > 2
Cooling water temperature, °C (°F) < 25 (77)
Weight of pump, kg (lb) 15 (33) 16 (35) 35 (77) 30 (66) 34 (75) 40 (88) 55 (121)

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EBARA ET1600W / WS Turbomolecular Vacuum Pump - REBUILT

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