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Edwards EPX180LE 208V Dry Vacuum Pump - NEW

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Manufacturer Part Number: A41943012
Edwards EPX180LE 208V Dry Vacuum Pump - NEW
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Edwards EPX180LE 208V Semiconductor Dry Vacuum Pump - NEW

The new compact EPX180 high vacuum dry pump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-5 Torr. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.

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Peak Speed 170 m3h-1 / 105 ft3min-1 / 2,835 lmin-1
Ultimate Vacuum < 1 x 104 mbar / < 7.5 x 10-5 / < 1 x 10-2 Pa Torr
Warm up time (to nominal performance)     30 min
Inlet Flange ISO63
Outlet flange NW25
Noise < 59 dB(A)
Water connectors 3/8 in Quick
Minimum cooling water flow rate 2 lmin-1
Cooling water temperature 15 - 35°C
Electrical supply 200/208 V, 50/60 Hz 3-phase
Power at ultimate 1.4 kW
Rated motor power 3.0 kW
TIM None
Weight 43.5 kg

Specs 

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Edwards EPX180LE 208V Semiconductor Dry Vacuum Pump - NEW

A41943012 / A419-43-012  EPX180LE  208V No TIM 3/8 water connector
A41943014 / A419-43-014  EPX180LE  400V No TIM 3/8 water connectors
A41943022 / A419-43-022  EPX180LE  208V No TIM 1/4 water connector
A41943024 / A419-43-024  EPX180LE  400V No TIM 1/4 water connectors
A41943112 / A419-43-112  EPX180LE  208V C3 TIM 3/8 water connector
A41943212 / A419-43-212  EPX180LE  208V SPI TIM 3/8 water connector
A41943222 / A419-43-222  EPX180LE  208V SPI TIM 1/4 water connector
A41943224 / A419-43-224  EPX180LE  400V SPI TIM 1/4 water connectors
A41943412 / A419-43-412  EPX180LE  208V TEL TIM 3/8 water connector
A41943612 / A419-43-612  EPX180LE  208V Hitachi TIM 3/8 water connector
A41943712 / A419-43-712  EPX180LE  208V MCM TIM 3/8 water connector
A41943714 / A419-43-714  EPX180LE  400V MCM TIM 3/8 water connectors
A41943722 / A419-43-722  EPX180LE  208V MCM TIM 1/4 water connector
OBSOLETED
 
A40902977 / A409-02-977  IPX100
A40902973 / A409-02-973  IPX100
A40904977 / A409-04-977  IPX100A
A40904973 / A409-04-973  IPX100A
A40924977 / A409-24-977  IPX180A
A40924973 / A409-24-973  IPX180A
A40914977 / A409-14-977  IPX500A
A40914973 / A409-14-973  IPX500A