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Edwards EPX500NE MCM 3/8 Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: A41954712
Edwards EPX500NE MCM 3/8 Dry Vacuum Pump - REBUILT
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Edwards EPX500NE MCM 3/8 Dry Vacuum Pump - REBUILT

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-5 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX NE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.

Peak Speed 500 m3h-1 / 295 ft3min-1 / 8,338 lmin-1
Ultimate Vacuum < 1 x 10-6 mbar / < 7 x 10-7 torr / < 1 x 10-4 Pa
Warm up time (to nominal performance)     30 min
Inlet Flange ISO160
Outlet flange NW25
Noise < 59 dB(A)
Minimum cooling water flow rate 2 lmin-1
Cooling water temp 15 - 35°C
Nitrogen supply interface 1/4 in tube
Nitrogen supply pressure 3 x 105 - 7 x 105 Pa
Minimum nitrogen purity 99.95%
Electrical Supply 200/208 50/60 Hz 3 Phase
Power at ultimate 1.4 kW
Rated motor power 30 kW
TIM None
Weight 45.2 kg

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Edwards EPX 500NE MCM 3/8 Dry Vacuum Pump - REBUILT

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