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Edwards EXT200/200H Split Flow - REBUILT

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Manufacturer Part Number: B756-42-991
Edwards EXT200/200H Split Flow - REBUILT
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Edwards EXT200/200H Split Flow - REBUILT

Edwards EXT200/200H Turbomolecular Vacuum Pump - REBUILT

The Edwards EXT turbomolecular and compound molecular pumps provide a reliable, hydrocarbon-free high and ultra high vacuum. Utilizing multi-stage axial flow turbines combined with magnetic and ceramic bearings, the EXT design provides oil and vibration free operation with minimal maintenance on high critical foreline pressure processes.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Specifications EXT70/200H EXT200/200H/HI EXT200/200H GCMS EXT200/200H ICPMS
Mass 9 kg
Side inlet-flange DN 100 ISO
Main inlet-flange DN 63 ISO DN 100 ISO
Outlet-flange DN 25 NW
Vent-port 1/8" BSP
Interstage-port (optional) DN 25 NW
Main inlet pumping speed
    N2 110 l/s-1 177 l/s-1 155 l/s-1 107 l/s-1
    He 145 l/s-1 190 l/s-1 185 l/s-1 113 l/s-1
    H2 130 l/s-1 163 l/s-1 175 l/s-1 102 l/s-1
    Ar - 153 l/s-1 104 l/s-1
Side inlet pumping speed
    N2 155 l/s-1
    He 131 l/s-1 179 l/s-1 187 l/s-1
    H2 79 l/s-1 131 l/s-1 143 l/s-1
    Ar - 127 l/s-1 148 l/s-1
Interstage pumping speed
    N2 - 8.75 l/s-1 N/A
    He - 10.4 l/s-1 N/A
Compression ratio from the backing port to the main inlet
    N2 > 5 x 107
    He 1 x 106 1 x 107 2.5 x 107
    H2 3.5 x 104 - 5 x 105
    Ar - > 5 x 107
Compression ratio from the side inlet to the main inlet
    N2 6 x 103 1 x 104 9 x 103
    He 6 x 102 1.5 x 102 2.5 x 102
    H2 2 x 101 3.3 x 101 6 x 101
    Ar - 1.7 x 104 7 x 103
Maximum backing pressure
    N2 12.6 mbar (1,260 Pa) 7.3 mbar (730 Pa) -
    He 7.7 mbar (770 Pa) -
    H2 2 mbar (200 Pa) -
    Ar - 8 mbar (800 Pa)
Minimum backing pump displacement 0.6 m3h-1
Maximum continuous inlet pressure - water-cooling at 35°C
    Main inlet 2.5 x 10-3 mbar (2.5 x 10-1 Pa) -
    Side inlet 5 x 10-3 mbar (5 x 10-1 Pa) -
Maximum continuous inlet pressure - air-cooling at 35°C
    Main inlet 3 x 10-3 mbar (3 x 10-1 Pa) 5 x 10-3 mbar (He: 7.5 x 10-3 mbar) 1 x 10-2 mbar (Ar: 5 x 10-3 mbar)
    Side inlet 9 x 10-3 mbar (9 x 10-1 Pa) 1.5 x 10-2 mbar (He: 5 x 10-3 mbar) 1 x 10-2 mbar (Ar: 5 x 10-3 mbar)
Operating attitude Vertical and upright through to horizontal ± 2° Vertical
Nominal rotational speed 60,000 r/min-1
Standby rotational speed 42,000 r/min-1
Starting time to 90% speed
    EXDC160 110 sec 120 sec 150 sec
    EXC100E 190 sec -
    EXC100L - 245 sec
    EXC120 130 sec -
    EXC300 100 sec - 120 sec
    EXDC80 - 270 sec 330 sec
Cooling method Forced-air/ water -
Ambient air temperature (forced-air cooling) 0 - 35°C
Water temperature (water-cooling) 10 - 20°C -
Noise level (at 1 metre) < 50 dB(A)
Recommended controller EXDC160
EXDC160 maximum VA input 250 VA
Quiescent power 25 W 40 W
Recommended backing pump RV3

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Edwards MODEL: EXT200/200H Turbomolecular Vacuum Pump - REBUILT

CODE: B756-42-991 / B75642991  EXT200/200H  GCMS 24V ROT (reversed body)
CODE: B756-41-991 / B75641991  EXT200/200H  MK2S GC
CODE: B756-24-991 / B75624991  EXT200/200H  24V Agilent	
      B756-01-991 / B75601991  EXT200/200H  PUMP ONLY 24V
      NRA7-51-000 / NRA751000  EXT200/200H  80V CARTRIDGE
      NRA0-93-000 / NRA093000  EXT200/200H  24V
      NRB0-14-000 / NRB014000  EXT200/200H  MK2E 80V
      B756-02-991 / B75602991  EXT200/200HI  24V
      B756-22-991 / B75622991  EXT200/200HI  24V
      B852-00-523 / B85200523  nEXT200/200D  REV SF 160W
      B756-10-000R / B75610000R  EXT200/200/30
      NRC3-56-000 / NRC356000  EXT400/200/30IIH
      B760-53-991 / B76053991  EXT400/200/30IPX CARTRIDGE