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Edwards EXT70H - REBUILT

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Manufacturer Part Number: B722-23-000
Edwards EXT70H - REBUILT
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Edwards EXT70H - REBUILT

Edwards EXT70H Turbomolecular Vacuum Pump - REBUILT

The Edwards EXT turbomolecular and compound molecular pumps provide a reliable, hydrocarbon-free high and ultra high vacuum. Utilizing multi-stage axial flow turbines combined with magnetic and ceramic bearings, the EXT design provides oil and vibration free operation with minimal maintenance on high critical foreline pressure processes.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange DN 63 ISO-K / DN 63 CF / DN 40 NW / DN 100 ISO-K
Pumping Speed  
    N2  ISO-63 / 63 CF (DN 40 NW) (ISO-100) 61 ls-1 (42 ls-1) (66 ls-1)
    He  ISO-63 / 63 CF (DN 40 NW) (ISO-100) 57 ls-1  (49 ls-1) (59 ls-1)
    H2  ISO-63 / 63 CF (DN 40 NW) (ISO-100) 53 ls-1  (48 ls-1) (54 ls-1)
Compression ratio  
    N2 > 1 × 1011
    He 1 x 106
    H2 5 x 104
Ultimate Pressure (mbar)  
    w/ RV backing pump ISO / CF < 5 x 10-9 / 5 x 10-10
    w/ diaphragm backing pump ISO/CF < 5 x 10-8 / 5 x 10-9
Outlet flange DN 16 NW
Recommended backing pump* RV5 / nXDS6i
Vent port 1/8 inch BSP
Purge port 1/8 inch BSP
Max continuous inlet pressure (light gas pumping)  
Water cooling (water at 15°C, ambient temp at 40°C)     2 × 10-2 mbar
Forced air cooled, 35°C ambient 1 × 10-2 mbar
Pump rotational speed  
    Nominal rotational speed 90,000 rpm
    Standby rotational speed Variable from 49,500 to 90,000 rpm
(63,000 rpm default)
Programmable power limit settings Variable from 50-120W (80W default)
Start time to 90% speed 110 s ‡
Analogue outputs Rotational speed;
Power consumption; Pump temp; Controller temp
Cooling method# Forced air / water
Ambient air temperature for forced air cooling 5 - 35°C
Min cooling water flow rate (water 15°C) 15 l h-1
Water temp range 10 - 20°C
Max inlet flange temp 100°C
Operating attitude Vertical and upright, through to
Noise level at 1 metre < 50 dB(A)
Max magnetic field pump can tolerate 5 mT
Recommended controller TIC 100 turbo and instrument controller
Quiescent electrical power 10 W

*  A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate <5 mbar may also be used e.g. XDD1.
†  Above this inlet pressure, rotational speed drops to below nominal.
‡  Power limit set to 80 W.
# Air and water cooling accessories must be ordered separately

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Edwards MODEL EXT70H Turbomolecular Vacuum Pump - REBUILT

CODE B722-23-000 / B72223000  EXT70H  DN 40 NW
CODE B722-22-000 / B72222000  EXT70H  DN 63 CF
CODE B722-21-000 / B72221000  EXT70H  DN 63 ISO-K
     B722-28-000 / B72228000  EXT70HI  DN 63 CF
     B722-29-000 / B72229000  EXT70HI  DN 63 ISO-K	
     B722-26-991 / B72226991  EXT70H  ISO-100 24V
     B722-01-000 / B72201000  EXT70  DN 63 ISO-K