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Edwards EXT75DX - NEW

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Edwards EXT75DX - NEW
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Edwards EXT75DX - NEW

Edwards EXT75DX Compound Turbomolecular Vacuum Pump - NEW

The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either a DN 40 NW, ISO-63, DN 63 CF or an ISO-100 inlet flange with an N2 pumping speed of up to 66 l/s-1. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.

  • Compatible with TIC turbo and instrument controller
  • Multiple communication modes available including parallel mode, which allows traditional control signal interface and serial mode, which allows RS232 interface
  • Numerous user configurable parameters via RS232 interface including vent valve control settings, normal speed indication, stand-by running speed, programmable power settings, power consumption and pump temperature.
  • Enhanced monitoring capability including pump speed, power and temperature.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Inlet flange DN63ISO-K, DN63CF, DN40NW or DN100ISO-K
Pumping Speed  l/s-1 NW40 ISO / CF63 ISO-100
    N2 42 61 66
    He 49 57 59
    H2 48 53 54
Compression ratio
    N2 > 1 × 1011
    He 1 x 106
    H2 5 x 104
Ultimate Pressure (mbar)
    w/ RV backing pump ISO/CF < 5 x 10-9 / 5 x 10-10
    w/ diaphragm backing pump ISO/CF < 5 x 10-8
Outlet flange DN16NW
Recommended backing pump* RV5 / nXDS6i
Vent port 1/8 inch BSP
Purge port 1/8 inch BSP
Max continuous inlet pressure (light gas pumping)†      
Water cooling (water at 15°C, ambient temp at 40°C) 2 × 10-2 mbar
Forced air cooled, 35°C ambient 1 × 10-2 mbar
Pump rotational speed  
Nominal rotational speed 90,000 rpm
Standby rotational speed Variable from 49,500 to 90,000 rpm
(63,000 rpm default)
Programmable power limit settings Variable from 50-120W (80W default)
Start time to 90% speed 110 s ‡
Analogue outputs Rotational speed;
Power consumption; Pump temp; Controller temp
Cooling method Forced air / water
Ambient air temperature for forced air cooling 5 - 35°C
Min cooling water flow rate (water 15°C) 15 l h-1
Water temp range 10 - 20°C
Max inlet flange temp 100°C
Operating attitude Vertical and upright, through to
Horizontal
Noise level at 1 metre < 50 dB(A)
Max magnetic field pump can tolerate 5 mT
Recommended controller TIC 100 turbo and instrument controller
Quiescent electrical power 10 W

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards MODEL: EXT75DX Compound Turbomolecular Vacuum Pump - NEW

CODE: B722-35-000 / B72235000  EXT75iDX  DN40NW
CODE: B722-37-000 / B72237000  EXT75iDX  DN63ISO-K
CODE: B722-38-000 / B72238000  EXT75iDX  DN63ISO-K (NW25 Interstage)
      B722-41-000 / B72241000  EXT75DX  DN63ISO-K  
      B722-42-000 / B72242000  EXT75DX  DN63CF
      B722-43-000 / B72243000  EXT75DX  DN40NW 
      B722-45-000 / B72245000  EXT75DX  DN100ISOK
      B722-46-000 / B72246000  EXT75DX  DN100ISO-K (DN25NW Backing)