Edwards EXT75DX Compound Turbo Vacuum Pump - REBUILT
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Edwards EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT
The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either aDN40NW, ISO63, DN63CF or an ISO100 inlet flange with an N2 pumping speed of up to 66ls-1. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.
|Inlet flange||DN63ISO-K, DN63CF, DN40NW or DN100ISO-K|
|N2 ISO63/63CF (DN40NW)(ISO100)||61 ls-1 (42 ls-1) (66 ls-1)|
|He ISO63/63CF (DN40NW)(ISO100)||57 ls-1 (49 ls-1) (59 ls-1)|
|H2 ISO63/63CF (DN40NW)(ISO100)||53 ls-1 (48 ls-1) (54 ls-1)|
|N2||> 1 × 1011|
|He||1 x 106|
|H2||5 x 104|
|Ultimate Pressure (mbar)|
|With RV backing pump ISO/CF||< 5 x 10-9 / 5 x 10-10|
|With diaphragm backing pump ISO/CF||< 5 x 10-8 / 5 x 10-9|
|Recommended backing pump*||RV5/nXDS6i|
|Vent port||1/8 inch BSP|
|Purge port||1/8 inch BSP|
|Max continuous inlet pressure (light gas pumping)†|
|Water cooling (water at 15°C, ambient temp at 40°C)||2 × 10-2 mbar|
|Forced air cooled, 35°C ambient||1 × 10-2 mbar|
|Pump rotational speed|
|Nominal rotational speed||90,000 rpm|
|Standby rotational speed||Variable from 49,500 to 90,000 rpm
(63,000 rpm default)
|Programmable power limit settings||Variable from 50-120W (80W default)|
|Start time to 90% speed||110 s ‡|
|Analogue outputs||Rotational speed;
Power consumption; Pump temp; Controller temp
|Cooling method#||Forced air / water|
|Ambient air temperature for forced air cooling||5 - 35°C|
|Min cooling water flow rate (water 15°C)||15 l h-1|
|Water temp range||10 - 20°C|
|Max inlet flange temp||100°C|
|Operating attitude||Vertical and upright, through to
|Noise level at 1 metre||< 50 dB(A)|
|Max magnetic field pump can tolerate||5 mT|
|Recommended controller||TIC100 turbo and instrument controller|
|Quiescent electrical power||10 W|
* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate <5 mbar may also be used e.g. XDD1.
† Above this inlet pressure, rotational speed drops to below nominal.
‡ Power limit set to 80 W.
# Air and water cooling accessories must be ordered separately
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT EXT75DX DN40NW B72235000 EXT75DX DN63ISO-K B72241000 EXT75DX DN100ISOK B72245000 EXT75DX DN63ISO-K B72237000 EXT75DX DN63CF B72242000 EXT75DX DN100ISO-K (DN25NW Backing) B72246000 EXT75DX DN40NW B72243000 EXT75DX ISO63 B72248000 Let us know if you just need the power supply. D39647000
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