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Edwards EXT75DX Compound Turbo Vacuum Pump - REBUILT

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Manufacturer Part Number: B72235000
Edwards EXT75DX Compound Turbo Vacuum Pump - REBUILT
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Edwards EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT

The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either aDN40NW, ISO63, DN63CF or an ISO100 inlet flange with an N2 pumping speed of up to 66ls-1. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.

Inlet flange DN63ISO-K, DN63CF, DN40NW or DN100ISO-K
Pumping Speed  
  N2 ISO63/63CF (DN40NW)(ISO100) 61 ls-1 (42 ls-1) (66 ls-1)
  He ISO63/63CF (DN40NW)(ISO100) 57 ls-1  (49 ls-1) (59 ls-1)
  H2 ISO63/63CF (DN40NW)(ISO100) 53 ls-1  (48 ls-1) (54 ls-1)
Compression ratio  
  N2 > 1 × 1011
  He 1 x 106
  H2 5 x 104
Ultimate Pressure (mbar)  
With RV backing pump ISO/CF < 5 x 10-9 / 5 x 10-10
With diaphragm backing pump ISO/CF < 5 x 10-8 / 5 x 10-9
Outlet flange DN16NW
Recommended backing pump* RV5/nXDS6i
Vent port 1/8 inch BSP
Purge port 1/8 inch BSP
Max continuous inlet pressure (light gas pumping)  
Water cooling (water at 15°C, ambient temp at 40°C) 2 × 10-2 mbar
Forced air cooled, 35°C ambient 1 × 10-2 mbar
Pump rotational speed  
Nominal rotational speed 90,000 rpm
Standby rotational speed Variable from 49,500 to 90,000 rpm
(63,000 rpm default)
Programmable power limit settings Variable from 50-120W (80W default)
Start time to 90% speed 110 s ‡
Analogue outputs Rotational speed;
Power consumption; Pump temp; Controller temp
Cooling method# Forced air / water
Ambient air temperature for forced air cooling 5 - 35°C
Min cooling water flow rate (water 15°C) 15 l h-1
Water temp range 10 - 20°C
Max inlet flange temp 100°C
Operating attitude Vertical and upright, through to
Noise level at 1 metre < 50 dB(A)
Max magnetic field pump can tolerate 5 mT
Recommended controller TIC100 turbo and instrument controller
Quiescent electrical power 10 W

*  A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate <5 mbar may also be used e.g. XDD1.
†  Above this inlet pressure, rotational speed drops to below nominal.
‡  Power limit set to 80 W.
# Air and water cooling accessories must be ordered separately

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT




EXT75DX  DN100ISO-K (DN25NW Backing)

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