Edwards EXT75DX Compound Turbo Vacuum Pump - REBUILT
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Edwards EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT
The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either a DN 40 NW, ISO-63, DN 63 CF or an ISO-100 inlet flange with an N2 pumping speed of up to 66ls-1. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Inlet flange||DN 63 ISO-K / DN 63 CF / DN 40 NW / DN 100 ISO-K|
|N2 ISO-63 / 63 CF (DN 40 NW) (ISO-100)||61 ls-1 (42 ls-1) (66 ls-1)|
|He ISO-63 / 63 CF (DN 40 NW) (ISO-100)||57 ls-1 (49 ls-1) (59 ls-1)|
|H2 ISO-63 / 63 CF (DN 40 NW) (ISO-100)||53 ls-1 (48 ls-1) (54 ls-1)|
|N2||> 1 × 1011|
|He||1 x 106|
|H2||5 x 104|
|Ultimate Pressure (mbar)|
|w/ RV backing pump ISO / CF||< 5 x 10-9 / 5 x 10-10|
|w/ diaphragm backing pump ISO/CF||< 5 x 10-8 / 5 x 10-9|
|Outlet flange||DN 16 NW|
|Recommended backing pump*||RV5 / nXDS6i|
|Vent port||1/8 inch BSP|
|Purge port||1/8 inch BSP|
|Max continuous inlet pressure (light gas pumping)†|
|Water cooling (water at 15°C, ambient temp at 40°C)||2 × 10-2 mbar|
|Forced air cooled, 35°C ambient||1 × 10-2 mbar|
|Pump rotational speed|
|Nominal rotational speed||90,000 rpm|
|Standby rotational speed||Variable from 49,500 to 90,000 rpm
(63,000 rpm default)
|Programmable power limit settings||Variable from 50-120W (80W default)|
|Start time to 90% speed||110 s ‡|
|Analogue outputs||Rotational speed;
Power consumption; Pump temp; Controller temp
|Cooling method#||Forced air / water|
|Ambient air temperature for forced air cooling||5 - 35°C|
|Min cooling water flow rate (water 15°C)||15 l h-1|
|Water temp range||10 - 20°C|
|Max inlet flange temp||100°C|
|Operating attitude||Vertical and upright, through to
|Noise level at 1 metre||< 50 dB(A)|
|Max magnetic field pump can tolerate||5 mT|
|Recommended controller||TIC 100 turbo and instrument controller|
|Quiescent electrical power||10 W|
* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate <5 mbar may also be used e.g. XDD1.
† Above this inlet pressure, rotational speed drops to below nominal.
‡ Power limit set to 80 W.
# Air and water cooling accessories must be ordered separately
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT B72235000 B722-35-000 EXT75DX DN 40 NW B72241000 B722-41-000 EXT75DX DN 63 ISO-K B72245000 B722-45-000 EXT75DX DN 100 ISO-K B72237000 B722-37-000 EXT75DX DN 63 ISO-K B72242000 B722-42-000 EXT75DX DN 63 CF B72246000 B722-46-000 EXT75DX DN 100 ISO-K (DN 25 NW Backing) B72243000 B722-43-000 EXT75DX DN 40 NW B72248000 B722-48-000 EXT75DX ISO-63 Let us know if you just need the power supply. D39647000