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Edwards iF1800 Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: A53323975
Edwards iF1800 Dry Vacuum Pump - REBUILT
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Edwards iF1800 Dry Vacuum Pump - REBUILT

Edwards iH and iF system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.

  • Gas Module: controls nitrogen purges and monitors exhaust pressure.
  • Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
  • Electrics Module: used for low voltage power requirements.
  • Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
Parameter 50 Hz 60 Hz
Typical peak pumping speed 1,720 m3h-1 1,800 m3h-1
Typical ultimate vacuum with shaft seals purge only (50 and 60 Hz) 8 x 10-4 mbar
0.08 Pa
5 x 10-4 mbar
0.05 Pa
Maximum inlet pressure (50 and 60 Hz) Atmospheric mbar / Pa
Maximum operating time at maximum inlet pressure (50 and 60 Hz) 60 seconds
Inlet connection ISO160
Outlet connection NW40
Mass 585 kg
Noise level measured at 1 m from the pump (with enclosure panels fitted) < 64 dB(A) < 69 dB(A)
Warm-up time to nominal pumping performance 15 min
Minimum warm-up time to process gas pumping 4 hours
Vacuum system maximum leak-rate 1 x 10-5 mbar ls-1 (1 x 10-3 Pa ls-1)
Exhaust system maximum leak-rate 1 x 10-5 mbar ls-1 (1 x 10-3 Pa ls-1)
Ambient operating temperature range 5 to 40°C
Maximum ambient operating humidity 90% RH

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Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards iF1800 Dry Vacuum Pump - REBUILT

A53323975, 069302478
A533-23-975, 079304077

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