Edwards iF1800 Dry Vacuum Pump - REBUILT
Manufacturer Part Number: A53323975
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Edwards iF1800 Semiconductor Dry Vacuum Pump - REBUILT
Edwards iH and iF system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.
- Gas Module: controls nitrogen purges and monitors exhaust pressure.
- Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
- Electrics Module: used for low voltage power requirements.
- Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Parameter | 50 Hz | 60 Hz |
|---|---|---|
| Typical peak pumping speed | 1,720 m3h-1 | 1,800 m3h-1 |
| Typical ultimate vacuum with shaft seals purge only (50 and 60 Hz) | 8 x 10-4 mbar 0.08 Pa |
5 x 10-4 mbar 0.05 Pa |
| Maximum inlet pressure (50 and 60 Hz) | Atmospheric mbar / Pa | |
| Maximum operating time at maximum inlet pressure (50 and 60 Hz) | 60 seconds | |
| Inlet connection | ISO160 | |
| Outlet connection | NW40 | |
| Mass | 585 kg | |
| Noise level measured at 1 m from the pump (with enclosure panels fitted) | < 64 dB(A) | < 69 dB(A) |
| Warm-up time to nominal pumping performance | 15 min | |
| Minimum warm-up time to process gas pumping | 4 hours | |
| Vacuum system maximum leak-rate | 1 x 10-5 mbar ls-1 (1 x 10-3 Pa ls-1) | |
| Exhaust system maximum leak-rate | 1 x 10-5 mbar ls-1 (1 x 10-3 Pa ls-1) | |
| Ambient operating temperature range | 5 to 40°C | |
| Maximum ambient operating humidity | 90% RH | |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards iF1800 Semiconductor Dry Vacuum Pump - REBUILT
A53323975, 069302478
A533-23-975, 079304077
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