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Edwards iGX100M Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: A54612958
Edwards iGX100M Dry Vacuum Pump - REBUILT
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Edwards iGX100M Dry Vacuum Pump - REBUILT

The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Peak speed 105 m3h-1
  62 cfm
  1,750 l min-1
Ultimate pressure 5.00E-03 mbar
  3.75E-03 Torr
  0.50 Pa
Power at 700 Torr exhaust  
Ultimate 1 kW
AUC (Active Utility Controller)     0.05 kW
Water inlet* 1 slm
Nitrogen 4 or 14 slm
Footprint excluding exhaust 0.20 m2
Weight 120 kg
Inlet connection ISO63
Outlet connection NW25
Noise at ultimate < 55 dB(A)

* Requires constant flow valve accessory.

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards iGX100M Dry Vacuum Pump - REBUILT

A53612958 	iGX100M 200-230V 50/60Hz A536-12-958 
A53612959 	iGX100M 380-460V 50/60Hz A536-12-959 

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