Edwards iGX600M - REBUILT
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Edwards iGX600M Semiconductor Dry Vacuum Pump - REBUILT
The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Peak speed||620 m3h-1|
|10,333 l min-1|
|Ultimate pressure||7.00E-04 mbar|
|Power at 700 Torr exhaust|
|AUC (Active Utility Controller)||0.05 kW|
|Water inlet*||2 slm|
|Nitrogen||4 or 14 slm|
|Footprint excluding exhaust||0.20 m2|
|Noise at ultimate||< 55 dB(A)|
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards iGX600M Semiconductor Dry Vacuum Pump - REBUILT A53632958 / A536-32-958 iGX600M 200-230V 50/60Hz A54632958 / A546-32-958 iGX600M 200-230V 50/60Hz A54632959 / A546-32-959 iGX600M 380-460V 50/60Hz A54832958 / A548-32-958 iGX600M 200-230V 50/60Hz SS