Edwards iH1000 Dry Vacuum Pump - NEW
Edwards iH1000 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Peak speed||1,000 m3h-1
|Ultimate vacuum||1 x 10-3 mbar
7.5 x 10-4 Torr
|Typical shaft seal nitrogen flow||4 slm|
|Typical cooling water flow at 15 psi pressure drop||240 lh-1
|Power input at ultimate||3.8 kW|
|Rated motor power||6.1 kW|
|Oil capacity||1.48 l|
All figures are typical without gas ballast.
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards iH1000 Semiconductor Dry Vacuum Pump - NEW A59030908 / A590-30-908 iH1000 460V 60Hz three-phase A59030945 / A590-30-945 iH1000 200/208V 50/60Hz 3-phase A59030946 / A590-30-946 iH1000 380/415V 50Hz 3-phase A59030957 / A590-30-957 iH1000 230V 60Hz 3-phase