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Edwards iH1000 Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: A533-52-945
Edwards iH1000 Dry Vacuum Pump - REBUILT
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Edwards iH1000 Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Peak speed 1,000 m3h-1
  589 cfm
  16,670 l min-1
Ultimate vacuum 1 x 10-3 mbar
  7.5 x 10-4 Torr
  0.1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 l h-1
  4 l min-1
Weight 430 kg
Power input at ultimate 3.8 kW
Rated motor power 6.1 kW
Oil capacity 1.48 l

 

All figures are typical without gas ballast.

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Edwards iH1000 Dry Vacuum Pump - REBUILT

A59030908 A590-30-908  iH1000  460V 60Hz 3Ø
A59030945 A590-30-945  iH1000  200/208V 50/60Hz 3Ø
A59030946 A590-30-946  iH1000  380/415V 50Hz 3Ø
A59030957 A590-30-957  iH1000  230V 60Hz 3Ø
A53383945 A533-83-945  iH1000  208V 60Hz
A53387945 A533-87-945  iH1000 Enhanced  208V 60Hz
A53342945 A533-42-945  iH1000 HEAC  208V 60Hz
A53352945 A533-52-945  iH1000 New Look  208V 60Hz
A59030945 A590-30-945  iH1000 Mark V  208V 60Hz
A53383946 A533-83-946  iH1000  380/415V 50Hz 
A53387946 A533-87-946  iH1000 Enhanced  380/415V 50Hz 
A53342946 A533-42-946  iH1000 HEAC  380/415V 50Hz  
A53352946 A533-52-946  iH1000 New Look  380/415V 50Hz 
A59030946 A590-30-946  iH1000 Mark V  380/415V 50Hz  

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