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Edwards iH1000 Dry Vacuum Pump - REBUILT

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Manufacturer Part Number: A533-52-945
Edwards iH1000 Dry Vacuum Pump - REBUILT
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Edwards iH1000 Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Peak speed 1,000 m3h-1
  589 cfm
  16,670 l min-1
Ultimate vacuum 1 x 10-3 mbar
  7.5 x 10-4 Torr
  0.1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 l h-1
  4 l min-1
Weight 430 kg
Power input at ultimate 3.8 kW
Rated motor power 6.1 kW
Oil capacity 1.48 l

 

All figures are typical without gas ballast.

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Edwards iH1000 Dry Vacuum Pump - REBUILT

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iH1000 380/415V 50Hz 
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iH1000 Enhanced 380/415V 50Hz 
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iH1000 HEAC 380/415V 50Hz  
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iH1000 Mark V 380/415V 50Hz  
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