Home > Vacuum Pumps > Dry > Edwards > iH - REBUILT > Edwards iH1000 Dry Vacuum Pump - REBUILT
Email Link Tweet This Share on Facebook

Edwards iH1000 Dry Vacuum Pump - REBUILT

Request for Quote

To request a quote, click the button below and fill out the form.


Manufacturer Part Number: A533-52-945
Edwards iH1000 Dry Vacuum Pump - REBUILT
Click Image to Enlarge

Edwards iH1000 Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Peak speed 1,000 m3h-1
  589 cfm
  16,670 l min-1
Ultimate vacuum 1 x 10-3 mbar
  7.5 x 10-4 Torr
  0.1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 l h-1
  4 l min-1
Weight 430 kg
Power input at ultimate 3.8 kW
Rated motor power 6.1 kW
Oil capacity 1.48 l


All figures are typical without gas ballast.

Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards iH1000 Dry Vacuum Pump - REBUILT

iH1000 Dry Pump 460V, 60 Hz 3Ø

iH1000 Dry Pump 200/208V, 50/60 Hz 3Ø

iH1000 Dry Pump 380/415V, 50 Hz 3Ø

iH1000 Dry Pump 230V, 60 Hz 3Ø

iH1000 208V 60Hz
A53383945 A533-83-945 

iH1000 Enhanced 208V 60Hz
A53387945 A533-87-945

iH1000 HEAC 208V 60Hz
A53342945 A533-42-945

iH1000 New Look 208V 60Hz
A53352945 A533-52-945

iH1000 Mark V 208V 60Hz
A59030945 A590-30-945

iH1000 380/415V 50Hz 
A53383946 A533-83-946 

iH1000 Enhanced 380/415V 50Hz 
A53387946 A533-87-946

iH1000 HEAC 380/415V 50Hz  
A53342946 A533-42-946

iH1000 New Look 380/415V 50Hz 
A53352946 A533-52-946

iH1000 Mark V 380/415V 50Hz  
A59030946 A590-30-946

Product Reviews

There are currently no customer reviews for this product.

Be the first to write a review!
We value your opinion. Please take a moment and share what you like or don't like about a product.

Write a review now