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Edwards iH160 Dry Vacuum Pump - NEW

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Manufacturer Part Number: A59010908
Edwards iH160 Dry Vacuum Pump - NEW
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Edwards iH160 Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

 

Peak speed

165 m3h-1
97 cfm
2,750 lmin-1
Ultimate vacuum 1 x 10-2 mbar
7.5 x 10-3 Torr
1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO63
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     120 lh-1
2 lmin-1
Weight 244 kg
Power input at ultimate 3.1 kW
Rated motor power 5.0 kW
Oil capacity 0.85 l

 

All figures are typical without gas ballast.

Specs

 

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Edwards iH160 Semiconductor Dry Vacuum Pump - NEW

A59010908 / A590-10-908  iH160  460V 60Hz three-phase
A59010945 / A590-10-945  iH160  200/208V 50/60Hz 3-phase
A59010946 / A590-10-946  iH160  380/415V 50Hz 3-phase
A59010957 / A590-10-957  iH160  230V 60Hz 3-phase
A53391945 / A533-91-945  iH160  200-208V 50/60Hz
A53506945 / A535-06-945  iH160  (VA) 200-208 50/60HZ