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Edwards iH160 Dry Vacuum Pump - NEW

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RFQ

Manufacturer Part Number: A59010908
Edwards iH160 Dry Vacuum Pump - NEW
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Edwards iH160 Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

 

 

Peak speed

165 m3h-1
97 cfm
2,750 lmin-1
Ultimate vacuum 1 x 10-2 mbar
7.5 x 10-3 Torr
1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO63
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     120 lh-1
2 lmin-1
Weight 244 kg
Power input at ultimate 3.1 kW
Rated motor power 5.0 kW
Oil capacity 0.85 l

 

All figures are typical without gas ballast.

Specs

 

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