Home > Vacuum Pumps > Dry > Edwards > iH - NEW > Edwards iH160 Dry Vacuum Pump - NEW
Email Link Tweet This Share on Facebook

Edwards iH160 Dry Vacuum Pump - NEW

Request for Quote

To request a quote, click the button below and fill out the form.


Manufacturer Part Number: A59010908
Edwards iH160 Dry Vacuum Pump - NEW
Click Image to Enlarge

Edwards iH160 Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.



Peak speed

165 m3h-1
97 cfm
2,750 lmin-1
Ultimate vacuum 1 x 10-2 mbar
7.5 x 10-3 Torr
1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO63
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     120 lh-1
2 lmin-1
Weight 244 kg
Power input at ultimate 3.1 kW
Rated motor power 5.0 kW
Oil capacity 0.85 l


All figures are typical without gas ballast.



Request for Quote

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.

Edwards iH160 Dry Vacuum Pump - NEW

iH160 Dry Pump 460V, 60 Hz 3Ø

iH160 Dry Pump 200/208V, 50/60 Hz 3Ø

iH160 Dry Pump 380/415V, 50 Hz 3Ø

iH160 Dry Pump 230V, 60 Hz 3Ø

iH160 Dry Pump 200-208V 50/60Hz

iH160 Dry Pump (VA) 200-208 50/60HZ

Product Reviews

There are currently no customer reviews for this product.

Be the first to write a review!
We value your opinion. Please take a moment and share what you like or don't like about a product.

Write a review now