Edwards iH160 Dry Vacuum Pump - NEW
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Edwards iH160 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Ultimate vacuum||1 x 10-2 mbar
7.5 x 10-3 Torr
|Typical shaft seal nitrogen flow||4 slm|
|Typical cooling water flow at 15 psi pressure drop||120 lh-1
|Power input at ultimate||3.1 kW|
|Rated motor power||5.0 kW|
|Oil capacity||0.85 l|
All figures are typical without gas ballast.
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards iH160 Semiconductor Dry Vacuum Pump - NEW A59010908 A590-10-908 iH160 460V 60Hz three-phase A59010945 A590-10-945 iH160 200/208V 50/60Hz 3-phase A59010946 A590-10-946 iH160 380/415V 50Hz 3-phase A59010957 A590-10-957 iH160 230V 60Hz 3-phase A53391945 A533-91-945 iH160 200-208V 50/60Hz A53506945 A535-06-945 iH160 (VA) 200-208 50/60HZ