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Edwards iH1800 Dry Vacuum Pump - NEW

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Manufacturer Part Number: A59040908
Edwards iH1800 Dry Vacuum Pump - NEW
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Edwards iH1800 Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Peak speed 1,800 m3h-1
1,060 cfm
30,000 lmin-1
Ultimate vacuum 1 x 10-3 mbar
7.5 x 10-4 Torr
0.1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO160
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 lh-1
4 lmin-1
Weight 502 kg
Power input at ultimate 4.1 kW
Rated motor power 7.0 kW
Oil capacity 1.6 l

 

All figures are typical without gas ballast.

Specs

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Edwards iH1800 Dry Vacuum Pump - NEW

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iH1800HTX Dry Pump 200/208V, 50/60 Hz 3Ø
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iH1800HTX Dry Pump 230V, 60 Hz 3Ø
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iH1800HTX Dry Pump 200/208V, 50/60 Hz 3Ø
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