Edwards iH1800 Dry Vacuum Pump - NEW
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Edwards iH1800 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
|Peak speed||1,800 m3h-1
|Ultimate vacuum||1 x 10-3 mbar
7.5 x 10-4 Torr
|Typical shaft seal nitrogen flow||4 slm|
|Typical cooling water flow at 15 psi pressure drop||240 lh-1
|Power input at ultimate||4.1 kW|
|Rated motor power||7.0 kW|
|Oil capacity||1.6 l|
All figures are typical without gas ballast.
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs. Please follow the above link, and fill out the quote form.
Edwards iH1800 Semiconductor Dry Vacuum Pump - NEW A59040908 A590-40-908 iH1800 460V 60Hz three-phase A59040945 A590-40-945 iH1800 200/208V 60Hz 3-phase A59040946 A590-40-946 iH1800 380/415V 50Hz 3-phase A59040957 A590-40-957 iH1800 230V 60Hz 3-phase A59060945 A590-60-945 iH1800 200/208V 50Hz 3-phase A59042908 A590-42-908 iH1800HTX 460V 60Hz 3-phase A59042945 A590-42-945 iH1800HTX 200/208V 50/60Hz 3-phase A59042946 A590-42-946 iH1800HTX 380/415V 50Hz 3-phase A59042957 A590-42-957 iH1800HTX 230V 60Hz 3-phase A59062945 A590-62-945 iH1800HTX 200/208V 50/60Hz 3-phase