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Edwards iH1800 - REBUILT

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Manufacturer Part Number: A59040908
Edwards iH1800 - REBUILT
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Edwards iH1800 - REBUILT

Edwards iH1800 Semiconductor Dry Vacuum Pump - REBUILT

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

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Peak speed 1,800 m3h-1
  1,060 cfm
  30,000 l/min-1
Ultimate vacuum 1 x 10-3 mbar
  7.5 x 10-4 Torr
  0.1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO160
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 l/h-1
  4 l/min-1
Weight 502 kg
Power input at ultimate 4.1 kW
Rated motor power 7.0 kW
Oil capacity 1.6 l


All figures are typical without gas ballast.

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Edwards iH1800 Semiconductor Dry Vacuum Pump - REBUILT

A59040908 / A590-40-908  iH1800  460V 60Hz three-phase
A59040945 / A590-40-945  iH1800  200/208V 60Hz 3-phase
A59040946 / A590-40-946  iH1800  380/415V 50Hz 3-phase
A59040957 / A590-40-957  iH1800  230V 60Hz 3-phase
A59060945 / A590-60-945  iH1800  200/208V 50Hz 3-phase
A53318945 / A533-18-945  iH1800 Enhanced  208V 60Hz
A53325945 / A533-25-945  iH1800 HEAC  208V 60Hz
A53353945 / A533-53-945  iH1800 New Look  208V 60Hz
A59040945 / A590-40-945  iH1800 Mark V  208V 60Hz
A53318946 / A533-18-946  iH1800 Enhanced  380/415V
A53325946 / A533-25-946  iH1800 HEAC  380/415V
A53353946 / A533-53-946  iH1800 New Look  380/415V
A59040946 / A590-40-946  iH1800 Mark V  380/415V
NRC529000 / NRC5-29-000  iH1800 NRV MK5 LV 
A53514945 / A535-14-945  iH1800 HTX New Look  200-208V
A53512945 / A535-12-945  iH1800 New Look  200-208V 50/60Hz
A59042946 / A590-42-946  iH1800 HTX MK5  380-460V
NRB633000 / NRB6-33-000  iH1800 PNL Cooled  200/208V 50/60Hz